УДК: 535.016, 535.15, 535.041.08

Study of the optical and photoluminescence properties of nanostructured zinc oxide films obtained by the ion–plasma method

Grigoriev, L.V., Rybin, S.S., Nefedov, V.G., Shakin, O.V., Mikhailov, A.V., Eliseev, E.N.

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Григорьев Л.В., Рыбин С.С., Нефёдов В.Г., Шакин О.В., Михайлов А.В., Елисеев Е.Н. Исследование оптических и фотолюминесцентных свойств наноструктурированных пленок оксида цинка, полученных ионно-плазменным методом // Оптический журнал. 2015. Т. 82. № 9. С. 75–81.

Grigoriev L.V., Rybin S.S., Nefedov V.G., Shakin O.V., Mikhailov A.V., Eliseev E.N. Study of the optical and photoluminescence properties of nanostructured zinc oxide films obtained by the ion–plasma method [in Russian] // Opticheskii Zhurnal. 2015. V. 82. № 9. P. 75–81.

For citation (Journal of Optical Technology):

L. V. Grigor’ev, S. S. Rybin, V. G. Nefedov, O. V. Shakin, A. V. Mikhaĭlov, and E. N. Eliseev, "Study of the optical and photoluminescence properties of nanostructured zinc oxide films obtained by the ion–plasma method," Journal of Optical Technology. 82(9), 634-638 (2015). https://doi.org/10.1364/JOT.82.000634

Abstract:

This paper presents the results of a study of the structural, optical, and photoluminescence properties of nanostructured zinc oxide films created by the method of ion–plasma sputtering of a metallic target at various gas pressures. It is shown that such zinc oxide films possess optical and photoluminescence properties close to those of single-crystal zinc oxide and can be used as a material for creating thin-film acoustooptic devices that operate on surface acoustic waves or for the receptor areas of UV photodetectors.

Keywords:

nanostructured thin films, zinc oxide, ion–plasma sputtering, optical spectrum, photoluminescence, UV photodetectors

Acknowledgements:

This work was carried out with the financial support of the Ministry of Education and Science of the Russian Federation (identifier PNIÉR: RFMEFI58114X0006).

OCIS codes: 250.0250, 300.0300, 310.0310, 160.0160

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