УДК: 544.537

Dynamics of the laser heating and oxidation of thin metallic films, allowing for absorptivity variation

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Шахно Е.А., Нгуен К.З. Динамика лазерного нагревания и окисления тонких металлических пленок с учетом изменения поглощательной способности // Оптический журнал. 2016. Т. 83. № 4. С. 31–37.

Shakhno E.A., Nguen Q.D. Dynamics of the laser heating and oxidation of thin metallic films, allowing for absorptivity variation [in Russian] // Opticheskii Zhurnal. 2016. V. 83. № 4. P. 31–37.

For citation (Journal of Optical Technology):

E. A. Shakhno and Q. D. Nguen, "Dynamics of the laser heating and oxidation of thin metallic films, allowing for absorptivity variation," Journal of Optical Technology. 83(4), 219-223 (2016). https://doi.org/10.1364/JOT.83.000219

Abstract:

The process of local laser oxidation of a thin metallic film in the submicron size range of the irradiated region is theoretically studied. The analysis takes into account the absorptivity variation of the film during irradiation. The ratio of the film thickness to the size of the irradiated region is determined for which the thermal processes are determined by the substrate’s thermal conductivity and for which the film experiences quasi-steady-state heating. A calculational model is developed for determining the dynamics of the heating and oxidation of a thin film, allowing for the negative feedback of the thickness of the oxide layer and the absorptivity of the film. Analytical expressions are obtained for determining the variation in time of the film temperature and the thickness of the oxide layer during the action of the radiation, and the main regularities of the process are detected. The relationship between the radial gradients of the film temperature and the thickness of the oxide layer being formed is determined.

Keywords:

thin metallic film, oxide, heating, absorptivity, diffraction optical elements

Acknowledgements:

The authors are grateful to V. P. Veı˘ko and D. A. Sinev for useful discussions.
This work was carried out with the state financial support of the leading universities of the Russian Federation (RF) (Subsidy 074-U01), Grant No. NSh 1364.201 from the President of the RF for state support of the leading scientific schools of the RF, and Grant No. 13-02-00033 of the Russian Foundation for Basic Research.

OCIS codes: 310.6860, 350.3390

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