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DOI: 10.17586/1023-5086-2022-89-02-60-67
УДК: 535, 617.7, 628.9
A heterodyne straightness interferometer with reduced periodic nonlinearities
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Publication in Journal of Optical Technology
Tao Jin, Mengying Han, Yanfen Le, Jinglin Liu, Wenmei Hou, Lihua Lei, Bo Zhang. A heterodyne straightness interferometer with reduced periodic nonlinearities (Гетеродинный интерферометрический измеритель прямолинейности с уменьшенной периодической нелинейностью) [на англ. яз.] // Оптический журнал. 2022. Т. 89. № 2. С. 60–67. http://doi.org/10.17586/1023-5086-2022-89-02-60-67
Tao Jin, Mengying Han, Yanfen Le, Jinglin Liu, Wenmei Hou, Lihua Lei, Bo Zhang. A heterodyne straightness interferometer with reduced periodic nonlinearities (Гетеродинный интерферометрический измеритель прямолинейности с уменьшенной периодической нелинейностью) [in English] // Opticheskii Zhurnal. 2022. V. 89. № 2. P. 60–67. http://doi.org/10.17586/1023-5086-2022-89-02-60-67
Tao Jin, Mengying Han, Yanfen Le, Jinglin Liu, Wenmei Hou, Lihua Lei, and Bo Zhang, "Heterodyne straightness interferometer with reduced periodic nonlinearities," Journal of Optical Technology. 89(2), 107-112 (2022). https://doi.org/10.1364/JOT.89.000107
A straightness heterodyne interferometer is proposed for measuring the straightness of a linear motion stage along its moving direction. The interferometer uses Koster prism as the beam splitter and combiner, a wedge prism as straightness sensor and a wedge mirror as reflector. The interferometric beams have a completely common optic path and space symmetrical measurement structure. The crosstalk errors, from other degrees of freedom, are eliminated due to the spatial symmetry optical path structure. While, the periodic nonlinearities due to the mixedfrequency cannot be eliminated by the optical configuration. To overcome this problem, we derived a periodic nonlinearities correction model. The coefficients of model are previously estimated by splitting the straightness measurement beam into two beams through a polarization beam splitter which placed at 45°. Afterwards, the model can be used to compensate the nonlinearities of straightness measurement. The results show that the nonlinear error is reduced to the resolution limitation of the straightness interferometer.
straightness interferometer, periodic nonlinearities, common optic path, nonlinearities correction model
Acknowledgements:This work is support by National Natural Science Foundation of China (NSFC) 51705324 and 51605297.
OCIS codes: 01.0010, 350.050
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