Experience of using reference mirrors to correct aberrations of the optical system of an interference microscope

Fandienko I.Y., Vishnyakov, G.N., Minaev, V.L., Shumsky E.V.

For Russian citation (Opticheskii Zhurnal):

Фандиенко И.Ю., Вишняков Г.Н., Минаев В.Л., Шумский Е.В. Опыт применения эталонных зеркал для коррекции аберраций оптической системы интерференционного микроскопа // Оптический журнал. 2026. Т. 93. № 10. С. 43–52. http://doi.org/10.17586/1023-5086-2026-93-10-43-52

Fandienko I.Yu., Vishnyakov G.N., Minaev V.L., Shumsky E.V. Experience of using standard mirrors to correct aberrations of the optical system of an interference microscope [in Russian] // Opticheskii Zhurnal. 2026. V. 93. № 10. P. 43–52. http://doi.org/10.17586/1023-5086-2026-93-10-43-52

For citation (Journal of Optical Technology):

Abstract:

Subject of study. Method of absolute calibration of an interference microscope using a surface of liquid as a reference plane. Aim of study. To improve the accuracy of surface profile measurements for optical components using an interference microscope by correcting for aberrations of the optical system using a liquid reference mirror. Method. The two-exposure method with subtraction of phase images of the reference surface. Comparison of step height measurement results using a liquid mirror as a reference surface with measurements without aberration correction or with correction, but using a phase image of a glass reference mirror. Modern algorithms for reconstructing the phase image from interferograms obtained under vibration conditions were used. Main results. It is proven that the use of a liquid mirror together with vibration-resistant phase reconstruction algorithms allows for a decrease in the relative measurement error of the surface profile height to 0.5% of the nominal height value. Practical significance. The proposed technique for absolute calibration of an interference microscope using a liquid mirror allows for an increase in the accuracy of micro profile measurements. This can be particularly useful for quality control of super-smooth optical surfaces with sub-nanometer precision.

Keywords:

interference microscope, liquid mirror, Linnik interferometer, phase-shifting method, aberrations

OCIS codes: 120.6650, 220.1000, 120.3180, 120.3930, 120.3940, 120.4290, 120.4630, 180.3170

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