Synthesis of phase computer-generated holograms without substrate etching for optical control and micromachining applications

Korolkov, V.P., Zaitseva V.E., Belousov, D.A., Malyshev, A.I., Golubtsov S.K., Bel'tyugov V.N., Sedukhin A.G.

For Russian citation (Opticheskii Zhurnal):

Корольков В.П., Зайцева В.Е., Белоусов Д.А., Малышев А.И., Голубцов С.К., Бельтюгов В.Н., Седухин А.Г. Синтез фазовых компьютерно-синтезированных голограмм без травления подложки для задач оптического контроля и микрообработки // Оптический журнал. 2026. Т. 93. № 5. С. 15–23. http://doi.org/10.17586/1023-5086-2026-93-05-15-23

Korolkov V.P., Zaitseva V.E., Belousov D.A., Malyshev A.I., Golubtsov S.K., Beltyugov V.N., Sedukhin A.G. Synthesis of phase computer-generated holograms without substrate etching for optical control and micromachining applications [in Russian] // Opticheskii Zhurnal. 2026. V. 93. № 5. P. 15–23. http://doi.org/10.17586/1023-5086-2026-93-05-15-23

For citation (Journal of Optical Technology):

Abstract:

Scope of research. Computer-generated phase holograms for optical control and micromachining applications. The purpose of the research. Theoretical and experimental study of an approach to the production of transmitting binary phase computer-synthesized holograms based on multilayer coatings. Method. The following technological processes were used sequentially to form the binary phase microrelief of the holograms: e-beam sputtering of multilayer dielectric coatings, magnetron sputtering of chromium films, thermochemical scanning laser writing and reactive ion etching. Main results. By optimizing the structure and composition of the multilayer coating, the possibility of obtaining a uniform etching depth is shown and the diffraction structure reflection is reduced. Practical significance. The implementation of the developed approach to the creation of the holograms will significantly increase the yield of usable elements and the economic efficiency of their use.

Keywords:

computer-generated holograms, multilayer coatings, binary microrelief, testing of aspherical surfaces, interferometry, Dammann gratings, laser material processing

Acknowledgements:

the research was supported by subsidy for financial support of the state assignment of the IA&E SB RAS (state registration № 124041700107-9). The equipment of the Central Research Center “Spectroscopy and Optics” of the IA&E SB RAS and Core Facilities VTAN NSU were used in the research.

OCIS codes: 050.1950, 050.6875, 120.4640, 120.3930

References:

1. Семенов А.П., Абдулкадыров М.А., Патрикеев В.Е. и др. Интерференционные методы контроля формы поверхностей крупногабаритных асферических деталей на основе линзовых и голограммных корректоров волнового фронта // Оптический журнал. 2013. Т. 80. № 4. С. 33–38.

Semenov A.P., Abdulkadyrov M.A., Patrikeev V.E., et al. Interference methods of testing the surface figure of large aspheric items, based on lens-type and holographic wave-front correctors // J. Opt. Technol. 2022. V. 80. № 4. P. 226–229. https://opg.optica.org/jot/abstract.cfm?uri=jot-80-4-226

2. Poleshchuk A.G., Nasyrov R.K., Asfour J.M. Combined computer-generated hologram for testing steep aspheric surfaces // Opt. Exp. 2009. V. 17. № 7. P. 5420–5425. https://doi.org/10.1364/OE.17.005420

3. Полещук А.Г. Эталонный дифракционный оптический элемент (варианты) // Патент РФ № 2534435. Бюл. 2014. № 33.

Poleshchuk A.G. Reference diffraction optical element (variants) // RF Patent № 2534435. Bull. 2014. № 33.

4. Полещук А.Г., Хомутов В.Н., Маточкин А.Е. и др. Лазерные интерферометры для контроля формы оптических поверхностей // Фотоника. 2016. Т. 58. № 4. С. 38. https://doi.org/10.22184/1993-7296.2016.58.4.38.50

Poleshchuk A.G., Khomutov V.N., Matochkin A.E., et al. Laser interferometers for optical surface testing // Photonics. 2016. V. 58. № 4. P. 38. https://doi.org/10.22184/1993-7296.2016.58.4.38.50

5. Poleshchuk A.G., Korolkov V.P. Laser writing systems and technologies for fabrication of binary and continuous relief diffractive optical elements // Proc. SPIE. 2007. V. 6732. P. 130–139. https://doi.org/10.1117/12.751930

6. Cherkashin V.V., Churin E.G., Korolkov V.P., et al. Processing parameter optimization for thermochemical writing of DOEs on chromium films // Proc. SPIE. 1997. V. 3010. P. 168–179. https://doi.org/10.1117/12.274415

7. Кирьянов В.П., Никитин В.Г. Измерение эффективности дифракционных оптических элементов методом сканирования // Автометрия. 2004. Т. 40. № 5. С. 82–93.

Kir'yanov V.P., Nikitin V.G. Measurement of efficiency of diffractive optical elements by scanning method [in Russian] // Avtometriya. 2004. V. 40. № 5. P. 82–93.

8. Колючкин В.В., Злоказов Е.Ю., Одиноков С.Б. и др. Метод когерентного контроля глубины поверхностного микрорельефа голограммных и дифракционных оптических элементов // Компьютерная оптика. 2015. Т. 39. № 4. С. 515–520.

Kolyuchkin V.V., Zlokazov E.Yu., Odinokov S.B. A coherent measurement method for checking the surface microrelief depth in holographic and diffractive optical elements [in Russian] // Comput. Opt. 2015. V. 39. № 4. P. 515–520.

9. Elfström H., Vallius T., Kuittinen M., et al. Diffractive elements with novel antireflection film stacks // Opt. Exp. 2004. V. 12. № 25. P. 6385–6390. https://doi.org/10.1364/OPEX.12.006385

10. Kolari K. High etch selectivity for plasma etching SiO₂ with AlN and Al₂O₃ masks // Microelectron. Eng. 2008. V. 85. № 5–6. P. 985–987. https://doi.org/10.1016/j.mee.2007.12.037

11. Котликов Е.Н. Металлодиэлектрические полосовые интерференционные фильтры // Оптический журнал. 2022. Т. 89. № 11. С. 70–75. https://doi.org/ 10.17586/1023-5086-2022-89-11-70-75

Kotlikov E.N. Metal-dielectric bandpass interference filters // J. Opt. Technol. 2022. V. 89. № 11. P. 687–690. https://doi.org/10.1364/JOT.89.000687

12. Головашкин Д.Л., Досколович Л.Л., Казанский Н.Л. и др. Дифракционная компьютерная оптика / Под ред. Сойфера В.А. М.: ФИЗМАТЛИТ, 2007. 736 с.

Golovashkin D.L., Doskolovich L.L., Kazansky N.L., et al. Diffraction computer optics [in Russian] / Ed. Soifer V.A. Moscow: “FIZMATLIT” Publ., 2007. 736 p.

13. Полещук А.Г., Маточкин А.Е., Черкашин В.В. и др. Интерферометр Физо с дифракционными эталонными сферами для контроля асферической оптики // Голография. Наука и практика. 2015. С. 168–171.

Poleshchuk A.G., Matochkin A.E., Cherkashin V.V., et al. Fizeau interferometer with diffraction reference spheres for monitoring aspherical optics [in Russian] // Holography. Science and Practice. 2015. P. 168–171.

14.Korolkov V.P., Nasyrov R.K., Sedukhin A.G., et al. Polarization effects in interferometric testing with f/1 diffractive transmission sphere // Proc. SPIE. 2020. V. 11551. P. 184–189. https://doi.org/10.1117/12.2573608

15. Электронный ресурс URL: https://all-pribors.ru/opisanie/45513-10-fizo?ysclid=mhg6uxodjc278528958 (Интерферометр Физо / Описание средства измерения).

Electronic resource URL: https://all-pribors.ru/opisanie/45513-10-fizo?ysclid=mhg6uxodjc278528958 (Fizo Interferometer / Description of the measuring instrument [in Russian]).

16. Dammann H., Klotz E. Coherent optical generation and inspection of two-dimensional periodic structures // Optica Acta Int. J. Opt. 1977. V. 24. № 4. P. 505–515. https://doi.org/10.1080/713819570

17. Korolkov V.P., Sedukhin A.G., Kuts R.I., et al. Analyzing the tolerances on direct laser writing of two-dimensional Dammann gratings and performing the software correction of writing modes // Proc. SPIE. 2022. V. 12318. P. 356–361. https://doi.org/10.1117/12.2643720