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ISSN: 1023-5086

ru/

ISSN: 1023-5086

Scientific and technical

Opticheskii Zhurnal

A full-text English translation of the journal is published by Optica Publishing Group under the title “Journal of Optical Technology”

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Pan, Xiaoxing

Affiliation
Huazhong University of Science and Technology, Wuhan, China

Articles

Qing Tao, Fengguang Luo, Jinxing Zhang, Bingcheng Mo, Rui Zhong, Dandan Miao, Xiaoxing Pan, Qianliang Liang Analysis of fabrication tolerance based on uneven thickness of Su8-photo-resist [на англ. яз.] // Оптический журнал. 2013. Т. 80. № 5. С. 94–97.

 

Qing Tao, Fengguang Luo, Jinxing Zhang, Bingcheng Mo, Rui Zhong, Dandan Miao, Xiaoxing Pan, Qianliang Liang Analysis of fabrication tolerance based on uneven thickness of Su8-photo-resist [in English] // Opticheskii Zhurnal. 2013. V. 80. № 5. P. 94–97.

 Abstract