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ISSN: 1023-5086

ru/

ISSN: 1023-5086

Scientific and technical

Opticheskii Zhurnal

A full-text English translation of the journal is published by Optica Publishing Group under the title “Journal of Optical Technology”

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Tao, Qing

Affiliation
Huazhong University of Science and Technology, Wuhan, China

E-mail: taoqing107@yahoo.com.cn

Articles

Qing Tao, Fengguang Luo, Jinxing Zhang, Bingcheng Mo, Rui Zhong, Dandan Miao, Xiaoxing Pan, Qianliang Liang Analysis of fabrication tolerance based on uneven thickness of Su8-photo-resist [на англ. яз.] // Оптический журнал. 2013. Т. 80. № 5. С. 94–97.

 

Qing Tao, Fengguang Luo, Jinxing Zhang, Bingcheng Mo, Rui Zhong, Dandan Miao, Xiaoxing Pan, Qianliang Liang Analysis of fabrication tolerance based on uneven thickness of Su8-photo-resist [in English] // Opticheskii Zhurnal. 2013. V. 80. № 5. P. 94–97.

 Abstract