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Method of pupil shaping for off-axis illumination in optical lithography
Full text «Opticheskii Zhurnal»
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Publication in Journal of Optical Technology
Ming Chen, Fang Zhang, Aijun Zeng, Jing Zhu, Baoxi Yang, and Huijie Huang Method of pupil shaping for off-axis illumination in optical lithography (Способ формирования зрачка для внеосевого освещения в оптической литографии) [на англ. яз.] // Оптический журнал. 2016. Т. 83. № 3. С. 20–26.
Ming Chen, Fang Zhang, Aijun Zeng, Jing Zhu, Baoxi Yang, and Huijie Huang Method of pupil shaping for off-axis illumination in optical lithography (Способ формирования зрачка для внеосевого освещения в оптической литографии) [in English] // Opticheskii Zhurnal. 2016. V. 83. № 3. P. 20–26.
Ming Chen, Fang Zhang, Aijun Zeng, Jing Zhu, Baoxi Yang, and Huijie Huang, "Method of pupil shaping for off-axis illumination in optical lithography," Journal of Optical Technology. 83(3), 154-158 (2016). https://doi.org/10.1364/JOT.83.000154
Off-axis illumination is one of the key resolution enhancement technologies in projection lithography systems. Phase type diffractive optical elements are adopted by most of the lithography machine manufacturers to realize off-axis illumination. In this paper, a method of pupil shaping for off-axis illumination in optical lithography is introduced which contains a zoom beam expander, circularly symmetric diffractive optical elements, and a Fourier lens. The method could produce the required illumination pattern for off-axis illumination at the pupil plane. Compared with the conventional method of off-axis illumination, the method in this paper could eliminate deterioration of the pupil thoroughly and reduces the difficulty of the optical design of the zoom lens. Based on this method, several circularly symmetric diffractive optical elements are designed for experiments, and a remarkable improvement in eliminating deterioration of the pupil is observed compared with the conventional method.
optical lithography, off-axis illumination, axicon, diffractive optical element, Fourier lens
OCIS codes: 110.5220, 090.1970, 220.4830
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