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ISSN: 1023-5086

ru/

ISSN: 1023-5086

Scientific and technical

Opticheskii Zhurnal

A full-text English translation of the journal is published by Optica Publishing Group under the title “Journal of Optical Technology”

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Zhang, Fang

Affiliation
University of Chinese Academy of Sciences, Beijing, China

Articles

Ming Chen, Fang Zhang, Aijun Zeng, Jing Zhu, Baoxi Yang, and Huijie Huang Method of pupil shaping for off-axis illumination in optical lithography (Способ формирования зрачка для внеосевого освещения в оптической литографии) [на англ. яз.] // Оптический журнал. 2016. Т. 83. № 3. С. 20–26.

 

Ming Chen, Fang Zhang, Aijun Zeng, Jing Zhu, Baoxi Yang, and Huijie Huang Method of pupil shaping for off-axis illumination in optical lithography (Способ формирования зрачка для внеосевого освещения в оптической литографии) [in English] // Opticheskii Zhurnal. 2016. V. 83. № 3. P. 20–26.

 Abstract