УДК: 621.327.9; 535-31; 537.527.3; 537.527.9

Vacuum-ultraviolet excilamps with excitation by a barrier corona discharge

Lomaev M.I., Skakun, V.S., Tarasenko V.F., Shitts D.V., Erofeev M.V.

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Ломаев М.И., Скакун В.С., Тарасенко В.Ф., Шитц Д.В., Ерофеев М.В. Эксилампы вакуумного ультрафиолетового диапазона с возбуждением барьерным коронным разрядом // Оптический журнал. 2012. Т. 79. № 8. С. 83–91.

Lomaev M. I., Skakun V. S., Tarasenko V. F., Shitts D. V., Erofeev M. V. Vacuum-ultraviolet excilamps with excitation by a barrier corona discharge [in English] // Opticheskii Zhurnal. 2012. V. 79. № 8. P. 83–91.

For citation (Journal of Optical Technology):

M. I. Lomaev, V. S. Skakun, V. F. Tarasenko, D. V. Shitts, and M. V. Erofeev, "Vacuum-ultraviolet excilamps with excitation by a barrier corona discharge," Journal of Optical Technology. 79(8), 503-508 (2012). https://doi.org/10.1364/JOT.79.000503

Abstract:

This paper presents the results of studies of excilamps with excitation by a barrier corona discharge, which is characterized by inhomogeneous broadening of the electric field between the electrodes, one of which is covered by a dielectric. It is established that the radiation efficiency from inert-gas dimers under these excitation conditions reaches 45% at 172 nm and 25% at 146 nm. These studies were used as a basis for creating a radiator complex consisting of sealed xenon-dimer excilamps with a radiation power of up to 120 W, and a wide-aperture compact excilamp with argon pumped through the discharge volume. The radiation power density of the compact excilamp reached 10 mW/cm2 in the windowless regime.

Keywords:

vacuum ultraviolet, exilampa, barrier corona, single-barrier discharge

OCIS codes: 230.6080; 260.7210

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