УДК: 681.723.26, 681.786.5

Three-mirror interferometer of partially coherent light for monitoring surface relief

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Сысоев Е.В. Трёхзеркальный интерферометр частично когерентного света для контроля рельефа поверхности // Оптический журнал. 2016. Т. 83. № 10. С. 42–47.

Sysoev E.V. Three-mirror interferometer of partially coherent light for monitoring surface relief [in Russian] // Opticheskii Zhurnal. 2016. V. 83. № 10. P. 42–47.

For citation (Journal of Optical Technology):

E. V. Sysoev, "Three-mirror interferometer of partially coherent light for monitoring surface relief," Journal of Optical Technology. 83(10), 613-617 (2016). https://doi.org/10.1364/JOT.83.000613

Abstract:

The interference of partially coherent light in a three-mirror interferometer with a low-coherence light source is analyzed. It is shown that a set of coherence layers (polyzonal interference) is formed when the distance between the two mirrors mounted in the interferometer’s reference arm is greater than the coherence length. An expression is obtained that describes the interference of partially coherent light in a three-mirror interferometer. The results of calculations, modeling, and experiments are presented.

Keywords:

interference of partially coherent light, scanning interferometer, interference monitoring of surface relief, differential interferogram

OCIS codes: 120.3180, 180.3170, 260.3160

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