Large-area three-dimensional profilometer based on digital micromirror device

Zhang Yunbo, Zeng Aijun, Huang Huijie, Hou W.

Полный текст на elibrary.ru

Публикация в Journal of Optical Technology

Ссылка для цитирования:

Yunbo Zhang, Aijun Zeng, Huijie Huang, Wenmei Hou Large-area three-dimensional profilometer based on digital micromirror device [на англ. яз.] // Оптический журнал. 2015. Т. 82. № 2. С. 51–56.

Yunbo Zhang, Aijun Zeng, Huijie Huang, Wenmei Hou Large-area three-dimensional profilometer based on digital micromirror device [in English] // Opticheskii Zhurnal. 2015. V. 82. № 2. P. 51–56.

Ссылка на англоязычную версию:

Yunbo Zhang, Aijun Zeng, Huijie Huang, and Wenmei Hou, "Large-area three-dimensional profilometer based on digital micromirror device," Journal of Optical Technology. 82(2), 102-107 (2015). https://doi.org/10.1364/JOT.82.000102

Аннотация:

The single pinhole scanning confocal microscope is suffering from scanning speed. This paper studies a large-area profilometer with multiple virtual pinholes. A digital micromirror device comprised of millions of micromirrors generates multiple virtual pinholes which are utilized for parallel scanning. The key parameters affecting the measurement can be configured conveniently by the digital micromirror device controller. The working principles of a digital micromirror device base confocal microscope have been analyzed and a setup has been built up. Tomographic images are acquired and the depth response curves are extracted. A structured silicon sample is measured and three-dimensional results have been reconstructed. The system repeatability is better than 60 nm.

Ключевые слова:

confocal microscope system, digital micromirror device, tomographic image

Благодарность:

Работа выполнена при финансовой поддержке Национального научно-технологического проекта Китая (грант № 2011ZX02402), Международной научно-технологической программы сотрудничества Китая (грант № 2011DFR10010) и Государственной ключевой лаборатории прикладной оптики (грант № Y1Q03FQK06).

Коды OCIS: 170.1790, 180.6900, 110.6880

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