Atmospheric- and low-pressure inductively coupled plasma as an ion source for a mass

Карташева М.А., Малешин М.Н., Даниленков В.И., Герасимов Г.Н. Индуктивно-связанная плазма атмосферного и низкого давления как источник ионов для масс-спектрометра // Оптический журнал. 2003. Т.70. №1. С. 60–64.

Kartasheva M. A., Maleshin M. N., Gerasimov G. N., Danilenkov V. I. Atmospheric- and low-pressure inductively coupled plasma as an ion source for a mass [in Russian] // Opticheskii Zhurnal. 2003. V. 70. No 1. P. 60–64.

M. A. Kartasheva, M. N. Maleshin, G. N. Gerasimov , and V. I. Danilenkov, "Atmospheric- and low-pressure inductively coupled plasma as an ion source for a mass," Journal of Optical Technology. 70(1), 51-54 (2003). https://doi.org/10.1364/JOT.70.000051

This paper presents a brief review of the use of an inductively coupled plasma as an ion source for a mass spectrometer. The possibilities of operating the source in various pressure ranges are discussed. It is shown that it is promising to use an inductively coupled plasma when the pressure of the working gas is reduced ~1–130 Torr!.