УДК: 537.52

Capacitive-discharge VUV lamp based on a water-vapor–argon mixture

Shuaibov A.K., Minya A.I., Gomoki Z.T., Shevera I.V., Gritsak R.V.

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Шуаибов А.К., Миня А.И., Гомоки З.Т., Шевера И.В., Грицак Р.В. ВУФ-лампа емкостного разряда на смеси паров воды с аргоном // Оптический журнал. 2012. Т. 79. № 8. С. 96–99.

Shuaibov A. K., Minya A. I., Gomoki Z. T., Shevera I. V., Gritsak R. V. Capacitive-discharge VUV lamp based on a water-vapor–argon mixture [in English] // Opticheskii Zhurnal. 2012. V. 79. № 8. P. 96–99.

For citation (Journal of Optical Technology):

A. K. Shuaibov, A. I. Minya, Z. T. Gomoki, I. V. Shevera, and R. V. Gritsak, "Capacitive-discharge VUV lamp based on a water-vapor–argon mixture," Journal of Optical Technology. 79(8), 512-514 (2012). https://doi.org/10.1364/JOT.79.000512

Abstract:

This paper presents the results of a study of the spectral characteristics of the plasma radiation (175–200 nm) of a pulse-periodic capacitive-discharge lamp that operates with a mixture of water vapor and argon. It is shown that capacitive discharge at low argon pressure is a broad-band source of vacuum ultraviolet radiation. The intensity of the emission bands of the capacitive-discharge plasma is optimized as a function of the partial pressures of argon and water vapor. The electron kinetic coefficients are calculated for a discharge in a mixture of argon and water vapor.

Keywords:

capacitive discharge, VUV radiation, electronic kinetic coefficients

OCIS codes: 280.5395

References:

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