Large-area three-dimensional profilometer based on digital micromirror device

Zhang, Yunbo, Zeng, Aijun, Huang, Huijie, Hou, W.

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Yunbo Zhang, Aijun Zeng, Huijie Huang, Wenmei Hou Large-area three-dimensional profilometer based on digital micromirror device [на англ. яз.] // Оптический журнал. 2015. Т. 82. № 2. С. 51–56.

Yunbo Zhang, Aijun Zeng, Huijie Huang, Wenmei Hou Large-area three-dimensional profilometer based on digital micromirror device [in English] // Opticheskii Zhurnal. 2015. V. 82. № 2. P. 51–56.

For citation (Journal of Optical Technology):

Yunbo Zhang, Aijun Zeng, Huijie Huang, and Wenmei Hou, "Large-area three-dimensional profilometer based on digital micromirror device," Journal of Optical Technology. 82(2), 102-107 (2015). https://doi.org/10.1364/JOT.82.000102

Abstract:

The single pinhole scanning confocal microscope is suffering from scanning speed. This paper studies a large-area profilometer with multiple virtual pinholes. A digital micromirror device comprised of millions of micromirrors generates multiple virtual pinholes which are utilized for parallel scanning. The key parameters affecting the measurement can be configured conveniently by the digital micromirror device controller. The working principles of a digital micromirror device base confocal microscope have been analyzed and a setup has been built up. Tomographic images are acquired and the depth response curves are extracted. A structured silicon sample is measured and three-dimensional results have been reconstructed. The system repeatability is better than 60 nm.

Keywords:

confocal microscope system, digital micromirror device, tomographic image

Acknowledgements:

This work is supported by National Science and Technology Major Project of China (Grant No. 2011ZX02402), International Science & Technology Cooperation Program of China (Grant No. 2011DFR10010) and State Key Laboratory of Applied Optics, China (No. Y1Q03FQK06).

OCIS codes: 170.1790, 180.6900, 110.6880

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