Methods for analyzing quality of diffraction gratings for linear-displacement sensors

Shishova, M.V., Odinokov, S.B., Lushnikov, D.S., Zherdev, A.Y.

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Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Шишова М.В., Одиноков С.Б., Лушников Д.С., Жердев А.Ю. Методы анализа качества дифракционных решеток для датчиков линейного перемещения // Оптический журнал. 2018. Т. 85. № 7. С. 27–32. http://doi.org/10.17586/1023-5086-2018-85-07-27-32

Shishova M.V., Odinokov S.B., Lushnikov D.S., Zherdev A.Yu. Methods for analyzing quality of diffraction gratings for linear-displacement sensors [in Russian] // Opticheskii Zhurnal. 2018. V. 85. № 7. P. 27–32. http://doi.org/10.17586/1023-5086-2018-85-07-27-32

For citation (Journal of Optical Technology):

M. V. Shishova, S. B. Odinokov, D. S. Lushnikov, and A. Y. Zherdev, "Methods for analyzing quality of diffraction gratings for linear-displacement sensors," Journal of Optical Technology. 85(7), 396-400 (2018). https://doi.org/10.1364/JOT.85.000396

Abstract:

The fundamental methods for analyzing the parameters of diffraction gratings (DGs) are presented. The features of the application of DGs as measurement scales in a linear-displacement sensor system are analyzed. A method and quality criteria for monitoring the parameters of real samples of measurement scales are proposed. These criteria generalize all diffraction efficiencies that affect the formation of quadrature signals in the system of an interferometric linear-displacement sensor.

Keywords:

diffraction grating, diffraction efficiency, measurement scale, interferometric linear-displacement sensor

Acknowledgements:

The study was performed at N. É. Bauman Moscow State Technical University (MSTU) with the support of the Ministry of Education and Science of the Russian Federation within the framework of the implementation of the project part of the state task (project No. 3.2236.2017/4.6).

OCIS codes: 050.1950, 120.3940

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