Effect of the amount of argon in an oxygen ion beam on the optical characteristics of titanium dioxide films obtained via ion-assisted electron beam evaporation

Kozyrev, А.А., Lebedev, A.D.

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For Russian citation (Opticheskii Zhurnal):

Козырев А.А., Лебедев А.Д. Влияние количества аргона в ионном пучке кислорода на оптические характеристики плёнок диоксида титана, полученных методом электронно-лучевого испарения с ионным ассистированием // Оптический журнал. 2019. Т. 86. № 10. С. 77–82. http://doi.org/10.17586/1023-5086-2019-86-10-77-82

Kozyrev A.A., Lebedev A.D. Effect of the amount of argon in an oxygen ion beam on the optical characteristics of titanium dioxide films obtained via ion-assisted electron beam evaporation [in Russian] // Opticheskii Zhurnal. 2019. V. 86. № 10. P. 77–82. http://doi.org/10.17586/1023-5086-2019-86-10-77-82

For citation (Journal of Optical Technology):

A. A. Kozyrev and A. D. Lebedev, "Effect of the amount of argon in an oxygen ion beam on the optical characteristics of titanium dioxide films obtained via ion-assisted electron beam evaporation," Journal of Optical Technology. 86(10), 666-670 (2019). https://doi.org/10.1364/JOT.86.000666

Abstract:

The effect of argon in a mixture with oxygen in an ion beam on the optical characteristics of titanium dioxide (TiO₂) obtained via ion-assisted electron beam evaporation in vacuum was studied. It was shown that the addition of an inert gas at a level of 20%–25% resulted in an increase in the refractive index of the resulting TiO₂ coating and a decrease in the sensitivity of the spectral characteristic of the coating to the effect of the atmosphere as a result of the decrease in the film porosity. The maximum amount of argon in the mixture was determined, amounting to 26%, at which the TiO₂ film had an extinction coefficient not exceeding k=0.0001.

Keywords:

titanium dioxide, ion assisting, argon

Acknowledgements:

The research was supported by the National Research Nuclear University MEPhI (02.a03.21.0005).

OCIS codes: 310.1860

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