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ISSN: 1023-5086


ISSN: 1023-5086

Scientific and technical

Opticheskii Zhurnal

A full-text English translation of the journal is published by Optica Publishing Group under the title “Journal of Optical Technology”

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DOI: 10.17586/1023-5086-2023-90-04-78-91

УДК: 535.21

Hybrid laser subtractive technology for the fabrication optofluidic elements in a nanoporous silicate matrix

For Russian citation (Opticheskii Zhurnal):

Шишкина А.С., Язан Алсаиф, Якимук В.А., Ли Чуньюй, Андреева О.В., Заколдаев Р.А. Гибридная лазерная субтрактивная технология формирования оптофлюидных элементов в нанопористой силикатной матрице // Оптический журнал. 2023. Т. 90. № 4. С. 78–91.


Shishkina А.S., Yazan AlSaif, Yakimuk V.А., Li Chunyu, Andreeva O.V., Zakoldaev R.А. Hybrid laser subtractive technology for the fabrication of optofluidic elements in a nanoporous silicate matrix [ In Russian] // Opticheskii Zhurnal. 2023. V. 90. № 4. P. 78–91.

For citation (Journal of Optical Technology):



Subject of study. Investigation of the effect of alkaline etching on three types of laser­induced modification initiated inside of nanoporous silicate matrix: birefringent structures, densification and decompaction of the material. The purpose. The influence of alkaline etching on the optical and morphological properties of three types of laser­induced modification of porous glass is being studied: birefringent structures, densification and decompaction of the material formed by ultrashort laser pulses. Methodology. The technology is implemented in three stages: (i) direct laser writing in the nanoporous silicate matrix using focused (20X, NA = 0.4) femtosecond laser pulses (n = 25–50 kHz, u = 1–45 mm/s, P = 15–60 mW, t = 500 and 2000 fs, l = 515 nm); (ii) alkaline etching in potassium hydroxide, which helps to clean up the fabricated tracks, in addition, at this stage, the average pore size increases to 17 nm; (iii) purification of the sample in distilled water followed by drying in a furnace. Main results. The conditions for fabrication of hollow microchannels with a length of 5 mm and a width of 5–7 µm. The microchannels were also filled with liquid (volume of 3 µl), where after 10–12 s the liquid completely evaporated. The microchannels possess a selective reflection in a narrow visible spectral range. Practical significance. A novel methodology of microchannel fabrication in nanoporous silicate matrix plates is demonstrated. The channel is surrounded by waveguiding layers that expand possible applications in optofluidics. The study opens up new possibilities in the development of volumetric microfluidic systems, which is in demand for the study of biochemical reactions or the diagnosis of environmental changes. In the future, such optofluidic elements in nanoporous silicate matrix can be in demand for novel chip­scale sensor devices or laboratories on a chip (lab on a chip).


Acknowledgment: the study was supported by a grant from the Russian Science Foundation (Project № 20­71­10103). The study on the input of laser radiation into an optofluidic microchannel was carried out as part of the financial support of the NIRMA FT MF grant of ITMO University “Channel optical waveguides in nanoporous optical materials for environmental diagnostics” by Yakimuk Veronika.


microchannels, porous glass, nanoporous matrix, femtosecond laser pulses, subtractive technology

OCIS codes: 140.3390, 160.2750

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