Determining the optical constants of thin metallic films while they are being deposited in vacuum

Андреев С.В., Путилин Э.С. Определение оптических постоянных тонких металлических пленок во время их осаждения в вакууме // Оптический журнал. 2008. Т. 75. № 4. С. 78–81.

Andreev S.V., Putilin E.S. Determining the optical constants of thin metallic films while they are being deposited in vacuum [in Russian] // Opticheskii Zhurnal. 2008. V. 75. № 4. P. 78–81.

S. V. Andreev and É. S. Putilin, "Determining the optical constants of thin metallic films while they are being deposited in vacuum," Journal of Optical Technology. 75 (4), 271-273 (2008). https://doi.org/10.1364/JOT.75.000271

This paper proposes a method of monitoring the optical constants and thickness of a layer while it is being deposited in vacuum, using measurements of the reflectance and transmittance on two substrates with different refractive indices. All four measured signals, as well as the background-illumination signal, are monitored by a monochromatic spatial radiation detector. The system was certified using nickel films up to 80nm thick.