Device for analyzing nanoroughness and contamination on a substrate from the dynamic state of a liquid drop deposited on its surface

Бородин С.А., Волков А.В., Казанский Н.Л. Устройство для анализа наношероховатостей и загрязнений подложки по динамическому состоянию капли жидкости, наносимой на ее поверхность // Оптический журнал. 2009. Т. 76. № 7. С. 42–47.

Borodin S.A., Volkov A.V., Kazanskiy N.L. Device for analyzing nanoroughness and contamination on a substrate from the dynamic state of a liquid drop deposited on its surface [in Russian] // Opticheskii Zhurnal. 2009. V. 76. № 7. P. 42–47.

S.A. Borodin, A.V. Volkov, and N.L. Kazanskiy, "Device for analyzing nanoroughness and contamination on a substrate from the dynamic state of a liquid drop deposited on its surface," Journal of Optical Technology. 76 (7), 408-412 (2009). https://doi.org/10.1364/JOT.76.000408

A method of rapid monitoring of the degree of surface cleanliness of substrates intended to form the microrelief of diffraction optical elements is developed in this article. A method for monitoring the nanoroughness and degree of surface cleanliness from the dynamic state of a liquid drop has been developed and patented. The results of experiments on estimating the behavior of a liquid drop, obtained by means of a high-speed video camera, are presented. The device is used to efficiently correct the final cleaning process of dielectric substrates.