Determining the topography of the birefringence in fluorite crystals and a study of how it affects the image quality of photolithographic projection systems

Ган М.А., Никулина Е.А. Определение топографии двулучепреломления в кристаллах флюорита и исследование его влияния на качество изображения
проекционных фотолитографических систем // Оптический журнал. 2011. Т. 78. № 11. С. 20–23.

Gan M.A., Nikulina E.A. Determining the topography of the birefringence in fluorite crystals and a study of how it affects the image quality of photolithographic projection systems [in Russian] // Opticheskii Zhurnal. 2011. V. 78. № 11. P. 20–23.

M. A. Gan and E. A. Nikulina, "Determining the topography of the birefringence in fluorite crystals and a study of how it affects the image quality of photolithographic projection systems," Journal of Optical Technology. 78(11), 706-708 (2011). https://doi.org/10.1364/JOT.78.000706

This paper discusses apparatus for measuring the characteristics of the residual birefringence of large optical crystals of fluorite by the method of crossed polarizing sheets. A mathematical model of the proposed method is presented. The point-spread function, which describes the influence of birefringence on the image quality, is analyzed.