Method for estimating the surface roughness of relief-phase holographic optical elements and its effect on their imaging properties

Корешев С.Н., Атлыгина Ю.В. Метод оценки шероховатости поверхности рельефно-фазовых голограммных оптических элементов и ее влияния на их изображающие свойства // Оптический журнал. 2011. Т. 78. № 3. С. 26–28.

Koreshev S.N., Atlygina Yu.V. Method for estimating the surface roughness of relief-phase holographic optical elements and its effect on their imaging properties [in Russian] // Opticheskii Zhurnal. 2011. V. 78. № 3. P. 26–28.

S. N. Koreshev and Yu. V. Atlygina, "Method for estimating the surface roughness of relief-phase holographic optical elements and its effect on their imaging properties," Journal of Optical Technology. 78(3), 174-175 (2011). https://doi.org/10.1364/JOT.78.000174

This paper describes a method for determining the short-wavelength usage limit of relief-phase holographic optical elements (HOEs), caused by their surface roughness. It essentially consists of using data obtained from an atomic-force microscope to determine the shape of the relief profile of an HOE, averaged over the base area, i.e., the scanning area; using this as a basis for determining its rms surface roughness, averaged over the same base area; and then calculating the limiting wavelength in which the HOE can be used. A software module has been developed for implementing this method.