УДК: 535.421
Optical properties of one-dimensional metal–dielectric diffraction gratings
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Publication in Journal of Optical Technology
Кузнецов С.А., Белотелов В.И., Калиш А.Н., Венгурлекар А., Звездин А.К. Оптические свойства металлодиэлектрических одномерных дифракционных решеток // Оптический журнал. 2011. Т. 78. № 5. С. 9–12.
Kuznetsov S.A., Belotelov V.I., Kalish A.N., Vengurlekar A., Zvezdin A.K. Optical properties of one-dimensional metal–dielectric diffraction gratings [in Russian] // Opticheskii Zhurnal. 2011. V. 78. № 5. P. 9–12.
S. A. Kuznetsov, A. Vengurlekar, A. K. Zvezdin, V. I. Belotelov, and A. N. Kalish, "Optical properties of one-dimensional metal–dielectric diffraction gratings," Journal of Optical Technology. 78(5), 291-293 (2011). https://doi.org/10.1364/JOT.78.000291
This paper discusses how the parameters of one-dimensional diffraction gratings affect the transmission and reflection spectra. It is shown that, when the walls in a metal–dielectric diffraction grating are tilted, the transmission and reflection spectra can change significantly by comparison with the case of vertical walls. Tilt of the walls can either increase or decrease the transmittance, depending on the grating structure. This makes it possible to obtain the necessary optical properties by varying the tilt angle of the walls. It is shown that the tilt angle of the walls can be determined by calculating the optical spectra and comparing the result with experiment.
plasmon polariton, metal grating, scatterometry
Acknowledgements:The reseach was supported by RFBR, the grant from the President of RF No. MK-3123.2011.2 and the fund "Dynasty".
OCIS codes: 050.6624, 240.6680, 050.1950, 310.6860
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