УДК: 535.417, 778.38

Method of synthesizing hologram projectors based on breaking down the structure of an object into typical elements, and a software package for implementing it

Koreshev, S.N., Nikanorov, O.V., Gromov, A.D.

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Корешев С.Н., Никаноров О.В., Громов А.Д. Метод синтеза голограмм-проекторов, основанный на разбиении структуры объекта на типовые элементы, и программный комплекс для его реализации // Оптический журнал. 2012. Т. 79. № 12. С. 30–37.

Koreshev S. N., Nikanorov O. V., Gromov A. D. Method of synthesizing hologram projectors based on breaking down the structure of an object into typical elements, and a software package for implementing it [in English] // Opticheskii Zhurnal. 2012. V. 79. № 12. P. 30–37.

For citation (Journal of Optical Technology):

S. N. Koreshev, O. V. Nikanorov, and A. D. Gromov, "Method of synthesizing hologram projectors based on breaking down the structure of an object into typical elements, and a software package for implementing it," Journal of Optical Technology. 79(12), 769-774 (2012). https://doi.org/10.1364/JOT.79.000769

Abstract:

A method is proposed for synthesizing Fresnel hologram projectors, based on breaking down the structure of an object into typical elements. The possibility provided by this method of substantially reducing the volume of required computations is pointed out as one of the main advantages of the proposal. A software package for synthesizing and reconstructing Fresnel hologram projectors is described that implements this method. The results of an experimental study of the package are presented, obtained in the process of a comparative analysis of the proposed method and a traditional method of synthesizing hologram projectors.

Keywords:

holographic projection photolithography, Fresnel hologram projector, synthesis of hologram projectors, digital hologram reconstruction, phase hologram, diffuse illumination, phase shift

OCIS codes: 090.1760

References:

1. S. N. Koreshev and V. P. Ratushny˘ı, “Using the method of holography to obtain images of two-dimensional objects when solving problems of high-resolution photolithography,” Opt. Zh. 71, No. 10, 32 (2004). [J. Opt. Technol. 71, 673 (2004)].
2. S. N. Koreshev and V. P. Ratushnyi, “Holographic method for obtaining images with limiting high resolution for extreme short-wave lithography problems,” Proc. SPIE 5290, 221 (2004).
3. F. Clube, S. Gray, D. Struchen, J. Tisserand, S. Malfoy, and Y. Darbellay, “Holographic microlithography,” Opt. Eng. 34, 2724 (1995).
4. S. N. Koreshev and V. P. Ratushny˘ı, “Focused image holograms in high-resolution holographic projection photolithography,” Opt. Spektrosk. 101, 1038 (2006). [Opt. Spectrosc. 101, 976 (2006)].
5. C. Jacobsen and M. Howells, “Projection x-ray lithography using computer-generated holograms: a study of compatibility with proximity lithography,” J. Appl. Phys. 71, 2993 (1992).
6. P. P. Naullenau, F. Salmassi, E. M. Cullikson, and J. A. Liddle, “Design and fabrication of a high-efficiency extreme-ultraviolet binary phase-only computer-generated hologram,” Appl. Opt. 46, 2581 (2007).
7. S. N. Koreshev, O. V. Nikanorov, and V. P. Ratushny˘ı, “Reconstruction of synthesized holograms fresnel projectors at angles of incidence of reconstructing wave that exceed the angle of incidence of the reference wave in hologram synthesis,” Opt. Spektrosk. 111, 156 (2011). [Opt. Spectrosc. 111, 134 (2011)].
8. S. N. Koreshev, O. V. Nikanorov, Yu. A. Ivanov, and I. A. Kozulin, “Program system for synthesis and digital reconstruction of hologramsprojectors: synthesis parameters effect on image reconstruction quality,” Opt. Zh. 77, No. 1, 42 (2010). [J. Opt. Technol. 77, 33 (2010)].
9. T. Shimobaba, H. Nakayama, N. Masuda, and T. Ito, “Rapid calculation algorithm of Fresnel computer-generated hologram using look-up table and wavefront-recording plane methods for three-dimensional display,” Opt. Express 18, 19504 (2010).
10. M. Lucente, “Interactive computation of holograms using a ‘look-up table’,” J. Electron. Imaging 2, No. 1, 28 (1993).
11. S. C. Kim and E. S. Kim, “Effective generation of digital holograms of three-dimensional objects using a novel ‘look-up table method’,” Appl. Opt. 47, No. 19, D55 (2008).
12. S. C. Kim and E. S. Kim, “Fast computation of hologram patterns of a 3D object using run-length encoding and novel look-up table methods,” Appl. Opt. 48, 1030 (2009).
13. S. N. Koreshev, O. V. Nikanorov, and I. A. Kozulin, “Choosing the synthesis parameters of hologram-projectors for photolithography,” Opt. Zh. 75, No. 9, 29 (2008). [J. Opt. Technol. 75, 558 (2008)].