УДК: 681.723.26

Laser-based modulation-interference microscopy of optical surfaces

Loparev ,.V., Zenzinov, S.Y., Ignat’ev P.S., Indukaev K.V., Osipov P.A., Romash E.V.

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Лопарев А.В., Зензинов А.Б., Игнатьев П.С., Индукаев К.В., Осипов П.А., Ромаш Е.В. Лазерная модуляционная интерференционная микроскопия оптических поверхностей // Оптический журнал. 2012. Т. 79. № 6. С. 72–78.

Loparev A.V., Romash E.V., Zenzinov A.B., Ignat’ev P.S., Indukaev K.V., Osipov P.A. Laser-based modulation-interference microscopy of optical surfaces [in Russian] // Opticheskii Zhurnal. 2012. V. 79. № 6. P. 72–78.

For citation (Journal of Optical Technology):

A. V. Loparev, E. V. Romash, A. B. Zenzinov, P. S. Ignat’ev, K. V. Indukaev, and P. A. Osipov, "Laser-based modulation-interference microscopy of optical surfaces," Journal of Optical Technology. 79(6), 366-370 (2012). https://doi.org/10.1364/JOT.79.000366

Abstract:

A new version of the modulation interference microscope with a long-path coordinate stage on aeromagnetic guides has been developed that can displace the microscope with nonrectilinearity no greater than 0.1 μm on a path length of up to 300 mm. The given modification of the microscope can be used to investigate the surface of large optical items having dimensions up to 300 × 300 × 100 mm with a resolution of 0.1 nm along the vertical and 10–100 nm in the sample plane. The design and operating principles of the main modules of the microscope are considered. Examples are used to show that the microscope thus developed has possibilities and advantages when optical surfaces are being investigated

Keywords:

modulation interference microscopy, optical anisotropy, studies of optical surfaces, topology of integral circuits, nanostructural studies

OCIS codes: 180.3170, 170.1650

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