УДК: 531.7.082.5:535.42/44

New method of diffraction monitoring of small angular and linear displacements

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Назаров В.Н., Соколов Ю.А. Новый метод дифракционного контроля малых угловых и линейных перемещений // Оптический журнал. 2013. Т. 80. № 12. С. 53–59.

Nazarov V. N., Sokolov Yu. A. New method of diffraction monitoring of small angular and linear displacements [in Russian] // Opticheskii Zhurnal. 2013. V. 80. № 12. P. 53–59.

For citation (Journal of Optical Technology):

V. N. Nazarov and Yu. A. Sokolov, "New method of diffraction monitoring of small angular and linear displacements," Journal of Optical Technology. 80(12), 756-760 (2013). https://doi.org/10.1364/JOT.80.000756

Abstract:

This paper discusses a new method of diffraction monitoring of small angular and linear displacements, based on a diffraction interferometer setup in which both interfering wave fronts are formed by diffraction elements. A mathematical model is obtained that describes a radiation-intensity distribution in the recording plane that agrees well with the experimental results. The calculated results showed that a compact diffraction autocollimator and a linear-displacement indicator could be created that possess high potential resolving power (up to 0.01<sup>′′</sup> and 2 nm, respectively) with the possibility of varying the sensitivity and measurement range of the absolute values of the angular and linear quantities by more than an order of magnitude.

Keywords:

diffraction control method, measurement of small displacements

OCIS codes: 050.1940; 260.3160; 120.4630; 120.3180

References:

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