УДК: 535.243.2, 539.23

Optical study of wedge-shaped films. Part I. Modeling

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Шаяпов В.Р., Аюпов Б.М. Исследование клиновидных пленок оптическими методами. Часть I. Моделирование // Оптический журнал. 2016. Т. 83. № 7. С. 68–75.

Shayapov V.R., Ayupov B.M. Optical study of wedge-shaped films. Part I. Modeling [in Russian] // Opticheskii Zhurnal. 2016. V. 83. № 7. P. 68–75.

For citation (Journal of Optical Technology):

V. R. Shayapov and B. M. Ayupov, "Optical study of wedge-shaped films. Part I. Modeling," Journal of Optical Technology. 83(7), 441-446 (2016). https://doi.org/10.1364/JOT.83.000441

Abstract:

This paper, which is being published in two parts, provides a summary and analysis of the various effects that occur in ellipsometry and reflection spectroscopy studies of wedge-shaped thin films. In the first part of the paper, we calculate various optical characteristics of wedge-shaped films on substrates: the reflection coefficients and the spatial distribution of the light intensity entering a null-ellipsometer detector. We discuss whether existing theoretical approaches can be used in the study of wedge-shaped films and examine specific issues that arise when using null ellipsometry to determine the ellipsometric parameters (ψ and Δ) of such films. Part II of this paper will describe the results obtained through an experimental study of wedge-shaped films.

Keywords:

films, wedgeness, ellipsometry, reflection spectra

Acknowledgements:

This work was performed under a Russian Government contract with the Institute for Inorganic Chemistry (Siberian Department, Russian Academy of Sciences).

OCIS codes: 240.0310, 240.2130, 240.6490, 310.6860

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