УДК: 535.243.2, 539.23

Optical study of wedge-shaped films. Part II. Experiments

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Шаяпов В.Р., Лебедев М.С. Исследование клиновидных пленок оптическими методами. Часть II. Эксперименты // Оптический журнал. 2016. Т. 83. № 7. С. 76–82.

Shayapov V.R., Lebedev M.S. Optical study of wedge-shaped films. Part II. Experiments [in Russian] // Opticheskii Zhurnal. 2016. V. 83. № 7. P. 76–82.

For citation (Journal of Optical Technology):

V. R. Shayapov and M. S. Lebedev, "Optical study of wedge-shaped films. Part II. Experiments," Journal of Optical Technology. 83(7), 447-451 (2016). https://doi.org/10.1364/JOT.83.000447

Abstract:

This paper, which is being published in two parts, provides a summary and analysis of the various effects that occur when ellipsometry and reflection spectrophotometry are used to investigate wedge-shaped thin films. Part II of this paper describes the capabilities and limitations of various experimental approaches for studying wedge-shaped films. We describe the results obtained for films produced by atomic-layer deposition and plasma chemical deposition. We study the capabilities of ellipsometry for determining the optical constants and thicknesses of wedge-shaped films. We propose a simple spectrophotometric approach for routine studies of thick wedge-shaped films.

Keywords:

films, wedgeness, atomic-layer deposition, reflection spectra

Acknowledgements:

The authors are deeply grateful to Yu. M. Rumyantsev and M. L. Kosinova for assistance and support in performing this study and for the research samples provided.

OCIS codes: 240.0310, 240.2130, 240.6490, 310.6860

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