On-line monitoring of optical precision goniometric structures

Kiriyanov, A.V., Zotov, A.A., Karakotskiy, A.G., Kiriyanov, V.P., Petukhov, A.D., Chukanov, V.V.

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Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Кирьянов А.В., Зотов А.А., Каракоцкий А.Г., Кирьянов В.П., Петухов А.Д., Чуканов В.В. Оперативный контроль оптических прецизионных углоизмерительных структур // Оптический журнал. 2019. Т. 86. № 9. С. 60–62. http://doi.org/10.17586/1023-5086-2019-86-09-60-62

Kiriyanov A.V., Zotov A.A., Karakotskiy A.G., Kiriyanov V.P., Petukhov A.D., Chukanov V.V. On-line monitoring of optical precision goniometric structures [in Russian] // Opticheskii Zhurnal. 2019. V. 86. № 9. P. 60–62. http://doi.org/10.17586/1023-5086-2019-86-09-60-62

For citation (Journal of Optical Technology):

A. V. Kir’yanov, A. A. Zotov, A. G. Karakotskiĭ, V. P. Kir’yanov, A. D. Petukhov, and V. V. Chukanov, "On-line monitoring of optical precision goniometric structures," Journal of Optical Technology. 86(9), 579-581 (2019). https://doi.org/10.1364/JOT.86.000579

Abstract:

It is shown that, in industrial production, when implementing 100% input monitoring of the metrological characteristics of precision optical angle-measuring structures (dials, rasters, and multibit graduated disks), the use of the differential measurement method is promising. An example of the use of this method in an automated setup for measuring and diagnosing damage to the topology of working samples and photomasks of angle-measuring structures is provided.

Keywords:

goniometric structure, element topology, angular error, circular measuring and diagnostic setup

Acknowledgements:

The study was funded by the subsidy for the fulfillment of the state assignment (Project IV.36.1.3, state registration No. AAAA-A17-11706061006-6) and conducted at the IAE, SB RAS.

OCIS codes: 230.4000, 230.0250, 230.0040, 120.5475

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