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ISSN: 1023-5086

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ISSN: 1023-5086

Scientific and technical

Opticheskii Zhurnal

A full-text English translation of the journal is published by Optica Publishing Group under the title “Journal of Optical Technology”

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DOI: 10.17586/1023-5086-2023-90-01-84-95

УДК: 535, 617.7, 628.9

Ultra-high sensitivity gas pressure sensor based on a cascaded Fabry–Perot interferometers and Vernier effect

Guo, X., Jiang, Chao, Ye, W., Sun, S., Liu, C., Huang, H.

Full text on elibrary.ru

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Guo X., Jiang C., Ye W., Sun S., Liu C., Huang H. Ultra-high sensitivity gas pressure sensor based on a cascaded Fabry–Perot interferometers and Vernier effect (Высокочувствительный датчик давления газа на основе каскадных интерферометров Фабри–Перо и эффекта Вернье) [на англ. яз.] // Оптический журнал. 2023. Т. 90. № 1. С. 84–95. http://doi.org/ 10.17586/1023-5086-2023-90-01-84-95

 

Guo X., Jiang C., Ye W., Sun S., Liu C., Huang H. Ultra-high sensitivity gas pressure sensor based on a cascaded Fabry–Perot interferometers and Vernier effect (Высокочувствительный датчик давления газа на основе каскадных интерферометров Фабри–Перо и эффекта Вернье)[in English] // Opticheskii Zhurnal. 2023. V. 90. № 1. P. 84–95. http://doi.org/10.17586/1023-5086-2023-90-01-84-95

For citation (Journal of Optical Technology):

Xiaoshan Guo, Chao Jiang, Wenhao Ye, Simei Sun, Changning Liu, and Huiling Huang, "Ultra-high-sensitivity gas pressure sensor based on a cascaded Fabry-Perot interferometer and the Vernier effect," Journal of Optical Technology. 90(1), 46-53 (2023). https://doi.org/10.1364/JOT.90.000046

Abstract:

Subject of study. An ultra sensitive gas pressure sensor based on a cascaded Fabry–Perot interferometer is proposed. Purpose of the work. In the proposed sensor, we greatly improve the gas pressure sensitivity of the sensor by using the optical Vernier effect method. Method. During the fabrication of the sensor, one Fabry–Perot interferometer is used as the sensing interferometer and the other Fabry–Perot interferometer is used as the reference interferometer. Both Fabry–Perot interferometers are fabricated by two sections of single-mode fibers spliced at both ends of a section of quartz capillary. Then, a micro hole is drilled in the capillary wall of the sensing Fabry–Perot interferometer by using femtosecond laser micro-processing technology for gas pressure measurement. When the free spectral ranges of two Fabry–Perot interferometers are similar, the optical Vernier effect will be generated by cascading them. By precisely controlling the cavity length difference between two Fabry–Perot interferometers, a very high sensitivity magnification factor can be obtained. Main Results. The experimental results show that the sensitivity of the Vernier effect sensor is 133.2 nm/MPa in the pressure measurement range of 0–0.8 Mpa, which is 33.3 times higher than that of the single sensor Fabry–Perot interferometer. In addition, the temperature cross-sensitivity of the sensor is relatively small, only 0.93 kPa/°C. The sensor is flexible in design, easy to manufacture and operate. Practical significance. The proposed sensor has extremely high gas pressure sensitivity, and it can be used in the fields of chemical production, pharmaceutical, oil and gas storage, environmental protection for high sensitivity gas pressure measurement.

 

Acknowledgement : this work was supported by the Middle-aged and Youth Science and Technology Innovation Team of Hubei Province Universities (T2020014); the Natural Science Foundation of Hubei Province (№ 2020CFB468); the Foundation of Graduate Innovation Research of Hubei Normal University (20210111).

Keywords:

optical fiber sensor, Fabry–Perot interferometer, femtosecond laser micro-machining, quartz capillary, gas pressure

OCIS codes: 060.2370, 050.2230, 130.6010, 280.4788

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