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ISSN: 1023-5086


ISSN: 1023-5086

Scientific and technical

Opticheskii Zhurnal

A full-text English translation of the journal is published by Optica Publishing Group under the title “Journal of Optical Technology”

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DOI: 10.17586/1023-5086-2023-90-04-68-77

УДК: 537.312.51:544.537

Laser pulse duration influence on the fused silica treatment by laser-induced microplasma

For Russian citation (Opticheskii Zhurnal):

Рымкевич В.С., Болошко А.А., Сергеев М.М. Влияние длительности импульса лазерного излучения на обработку кварцевого стекла лазерно-индуцированной микроплазмой // Оптический журнал. 2023. Т. 90. № 4. С. 68–77. 10.17586/1023-5086-2023-90-04-68-77


Rymkevich V.S., Boloshko A.A., Sergeev M.M. Laser pulse duration influence on the fused silica treatment by laser-induced microplasma // Opticheskii Zhurnal. 2023. V. 90. № 4. P. 68–77. 10.17586/1023-5086-2023-90-04-68-77

For citation (Journal of Optical Technology):



Research subject. The lifetime and delay in the formation of a laser­induced microplasma plume obtained using femto­ and nanosecond laser sources, as well as the geometry of tracks on a fused silica plate recorded by this plume, were studied. Research Objective. Determination of the influence of a laser pulse duration in the range from femto­ to nanoseconds on the lifetime of a plasma plume and the geometric characteristics of structures formed by a microplasma plume on the fused silica surface. Method. The time characteristics of the plasma plume were measured by simultaneous recording the plume glow intensity in time with a photomultiplier and the laser pulse intensity with a photodetector connected to an oscilloscope. The start of recording coincided with the signal from the photodetector. The geometric dimensions of the tracks on the fused silica surface were obtained using optical profilometry. Main results. The lifetime of a plasma plume depends on the duration and energy of the laser pulse, and the plasma formation delay has a linear dependence on the pulse duration. The minimum average plasma plume lifetime of 7 ns is achieved with a pulse duration less than 150 ps. In the nanosecond range, with a laser pulse duration more than 30 ns, an exponential increase in the lifetime of the plasma plume occurs due to the replenishment of the plume with the remaining part of the pulse. Practical significance. The studies presented in the work allow us to form recommendations for choosing the pulse duration to achieve certain geometric characteristics of the forming tracks. According to these studies, to reduce the lateral size of the tracks, it is recommended to use a shorter pulse duration, but to achieve deeper and wider structures, for example, for microfluidics devices, pulse durations greater than 50 ns should be used.


laser induced treatment, microplasma, fused silica, femtosecond pulses, nanoseconds pulses

OCIS codes: 140.3390, 350.5400, 220.4000, 320.2250, 320.4240

  1. Ehrhardt M., Lorenz P., Bayer L. et al. Studies of the confinement at laser­induced backside dry etching using infrared nanosecond laser pulses // Applied Surface Science. 2018. V. 427. P. 686–692.
  2. Hanada Y., Sugioka K., Midorikawa K. Laser­induced plasma­assisted ablation (LIPAA): fundamental and industrial applications // High­Power Laser Ablation VI. International Society for Optics and Photonics. 2006. V. 6261. P. 626111.
  3. Kostyuk G., Sergeev M., Zakoldaev R. et al. Fast microstructuring of silica glasses surface by NIR laser radiation // Optics and Lasers in Engineering. 2015. V. 68. P. 16–24.
  4. Xie X., Zhou C., Wei X. et al. Laser machining of transparent brittle materials: from machining strategies to applications // Opto­Electronic Advances. 2019. V. 2. № 1. P. 180017­1­180017–13.
  5. Rahman T., Qayyum H., Amin U. et al. The role of sacrificial target material in micromachining of glass using laser­induced plasma­assisted ablation (LIPAA) // Radiation Effects and Defects in Solids. 2021. V. 176. № 7–8. P. 662–672.
  6. Rymkevich V.S., Sergeev M.M., Zakoldaev R.A. Laser microplasma as a spot tool for glass processing: Focusing conditions // Journal of Materials Processing Technology. 2021. V. 292. P. 117061.
  7. Zhang J., Sugioka K., Midorikawa K. Laser­induced plasma­assisted ablation of fused quartz using the fourth harmonic of a Nd+: YAG laser // Applied Physics A. 1998. V. 67. № 5. P. 545–549.
  8. Kostyuk G., Shkuratova V., Petrov A. et al. Multisector binary phase plates on fused silica for generation of optical vortex beams superposition: Fabrication, characterization, and applications // Optics & Laser Technology. 2022. V. 152. P. 108161.
  9. Shkuratova V.A., Kostyuk G.K., Sergeev M.M. et al. Speckle­free smoothing of coherence laser beams by a homogenizer on uniaxial high birefringent crystal // Optical Materials Express. 2019. V. 9. № 5. P. 2392–2399.
  10. Xu S., Liu B., Pan C. et al. Ultrafast fabrication of micro­channels and graphite patterns on glass by nanosecond laser­induced plasma­assisted ablation (LIPAA) for electrofluidic devices // Journal of Materials Processing Technology. 2017. V. 247. P. 204–213.
  11. Sarma U., Joshi S.N. Numerical modelling and simulation of microchannel fabrication on polycarbonate using Laser­Induced Plasma Assisted Ablation (LIPAA) // Optik. 2020. V. 223. P. 165379.
  12. Sarma U., Joshi S.N. Effect of laser parameters on Laser­Induced Plasma­Assisted Ablation (LIPAA) of glass // Advances in Unconventional Machining and Composites. Springer. 2020. P. 67–76.­981­32­9471­4_6
  13. Karstens W., Smith D.Y. Optical properties of graphite // APS Meeting Abstracts. 2004. V. 1. P. 11012.
  14. Veiko V.P., Volkov S.A., Zakoldaev R.A. et al. Laser­induced microplasma as a tool for microstructuring transparent media // Quantum Electronics. 2017. V. 47. № 9. P. 842.
  15. Veiko V.P., Shakhno Е., Yakovlev E.B. Effective time of thermal effect of ultrashort laser pulses on dielectrics // Quantum Electronics. 2014. V. 44. № 4. P. 322.