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DOI: 10.17586/1023-5086-2025-92-03-79-88
УДК: 535.4, 681.7.055
Tolerancing research of technical implementation of the angle resolved scattering based on the robotic complex
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Машошин Д.А., Денисов Д.Г., Барышников Н.В. Исследование точностных возможностей технической реализации метода дифференциального рассеяния на базе роботизированного комплекса // Оптический журнал. 2025. Т. 92. № 3. С. 79–88. http://doi.org/10.17586/1023-5086-2025-92-03-79-88
Mashoshin D.A., Denisov D.G., Baryshnikov N.V. Tolerancing research of technical implementation of the angle resolved scattering based on the robotic complex [in Russian] // Opticheskii Zhurnal. 2025. V. 92. № 3. P. 79–88. http://doi.org/10.17586/1023-5086-2025-92-03-79-88
Subject of study. Technical implementation of the differential scattering method in the form of a robotic complex for quality control of optical surfaces of subnanometer roughness. Aim of study. Determination of the error in the angular positioning of the wrist of a robotic complex when implementing the differential scattering method in the tasks of controlling the roughness parameters of optical surfaces, as well as evaluating the error effect on the result of measuring surface roughness. Method. Experimental determination of the angular positioning error and assessment of the measured error influence by mathematical modeling. Main results. The original scheme of the technical implementation of the differential scattering method based on a robotic complex is shown and the angular repeatability of the robotic manipulators ends position, the error of their angular positioning is calculated and its effect on the measurement result is investigated. Practical significance. The results obtained in the work of determining the accuracy of the technical implementation of the angle resolved scattering method contribute to the creation of a finished product — an optoelectronic complex of optical surface quality control equipment, which is capable of measuring a level roughness of angstrom units.
angle resolved scattering, robotic complex, roughness measurement, angular positioning error
OCIS codes: 120.6660, 290.1483
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