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ISSN: 1023-5086

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ISSN: 1023-5086

Scientific and technical

Opticheskii Zhurnal

A full-text English translation of the journal is published by Optica Publishing Group under the title “Journal of Optical Technology”

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DOI: 10.17586/1023-5086-2026-93-02-79-87

УДК: 53.083

Technological control tools for roughness and defect structure of the surface of ZnGeP2 single crystals using coherent optics methods

Burimov, N.I., Zhurin T.A., Shandarov, S.M., Yudin, N.N., Khudoley A.L., Slyunko E.S., Podzyvalov, S.N., Kalsin A.Y., Zinoviev, M.M., Kuznetsov V.S., Lysenko A.B.
For Russian citation (Opticheskii Zhurnal):

Буримов Н.И., Журин Т.А., Шандаров С.М., Юдин Н.Н., Худолей А.Л., Слюнько Е.С., Подзывалов С.Н., Кальсин А.Ю., Зиновьев М.М., Кузнецов В.С., Лысенко А.Б. Средства технологического контроля шероховатости и дефектной структуры поверхности монокристаллов ZnGeP2 методами когерентной оптики // Оптический журнал. 2026. Т. 93. № 2. С. 79–87. http://doi.org/10.17586/1023-5086-2026-93-02-79-87  

Burimov N.I., Zhurin T.A., Shandarov S.M., Yudin N.N., Khudoley A.L., Slyunko E.S., Podzyvalov S.N., Kalsin A.Yu., Zinovev M.M., Kuznetsov V.S., Lysenko A.B. Means of technological control of roughness and defect structure of the surface of ZnGeP2 single crystals by coherent optics methods [in Russian] // Opticheskii Zhurnal. 2026. V. 93. № 2. P. 79–87. http://doi.org/10.17586/1023-5086-2026-93-02-79-87

For citation (Journal of Optical Technology):
-
Abstract:

Subject of the study. The subject of the research is the parameters of roughness obtained by methods of coherent optics, polished surfaces, monocrystalline materials of the infrared range, on the example of the monocrystal ZnGeP2. The aim of the work is to create a method for estimating the surface roughness of zinc-germanium diphosphide ZnGeP2 crystals, which can be used and integrated into the polishing process based on methods of coherent optics. The main results. A methodology for assessing the quality of surface treatment of crystals using a spatial filter has been developed. An experimental setup has been developed to evaluate the quality of surface polishing of ZnGeP2 crystals. Measurements of the intensity of the scattered radiation reflected from the surface of the crystal, due to its roughness, were carried out using a system of lenses and a spatial filter that suppresses the constant component in the radiation spectrum. A solid-state laser with a wavelength of 532 nm and a power of 20 mW was used as the radiation source. As a meter of the intensity of scattered radiation, a photodiode FD-24K was used, connected to a universal voltmeter B7-40/5. Measurements of the intensity values were carried out for 6 samples of crystals with different quality of processing of their faces. The practical value. The verification of the experimental data obtained with the use of an industrial profile meter shows the applicability of the developed method for the qualitative assessment of the surface roughness of optical infrared materials, including the possibility of integrating this method into the polishing process.

Keywords:

zinc germanium diphosphide ZnGeP2, crystal surface treatment quality assessment, crystal surface polishing, industrial profilometer

Acknowledgements:
the work was carried out within the framework of the State Task of the Ministry of Science and Higher Education of the Russian Federation for 2023–2025. (Assignment FEWM-2023-0012)

OCIS codes: 190.4400, 120.3940, 120.6660, 240.5770, 240.5450

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