DOI: 10.17586/1023-5086-2026-93-03-92-101
УДК: 538.975
Features of the application of broadband optical monitor systems in manufacturing of infrared interference filters
Тропин А.Н. Особенности применения спектральных систем контроля при изготовлении интерференционных фильтров для инфракрасного диапазона спектра // Оптический журнал. 2026. Т. 93. № 3. С. 92–101. http://doi.org/10.17586/1023-5086-2026-93-03-92-101
Tropin A.N. Features of the application of broadband optical monitor systems in manufacturing of infrared interference filters [in Russian] // Opticheskii Zhurnal. 2026. V. 93. № 3. P. 92–101. http://doi.org/10.17586/1023-5086-2026-93-03-92-101
Subject of study. Features of the application of broadband optical monitor systems used in manufacturing of interference filters for the infrared spectral range. Aim of study. Determination of the influence of different control strategies on the reproduction accuracy of designed precision multilayer infrared interference coatings and comparison of their efficiency. Method. Running a series of computational experiments simulating the real process of optical coatings vacuum deposition, taking into account characteristic features of the used spectral control system, applied film-forming materials, and topologies of formed multilayer structures. Main results. It has been established that the choice of control strategy affects the magnitude of errors in layer thicknesses, leading to distortion of spectral characteristics of multilayer thin-film coatings. The most effective control strategies have been identified for the considered model structures of interference filters. Practical significance. The research results presented in this work can be applied in practice during the manufacture of infrared interference coatings and filters. The possibility of applying the obtained results is demonstrated by an example of manufacturing a 27-layer long pass filter with short-wavelength transmission at 8.0 µm.
interference filter, vacuum deposition, multilayer thin-film coating, broadband optical monitoring
OCIS codes: 310.1860, 310.6805, 120.2440
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