On the theory of the ellipsometry of an actual surface

Гайнутдинов И.С., Несмелов Е.А., Шаймарданов Р.Г., Иванов В.А., Михайлов А.В. К теории эллипсометрии реальной поверхности // Оптический журнал. 2008. Т. 75. № 1. С. 53–56.

Gainutdinov I.S., Nesmelov E.A., Shaimardanov R.G., Ivanov V.A., Mikhailov A.V. On the theory of the ellipsometry of an actual surface [in Russian] // Opticheskii Zhurnal. 2008. V. 75. № 1. P. 53–56.

I. S. Gaĭnutdinov, E. A. Nesmelov, R. G. Shaĭmardanov, V. A. Ivanov, and A. V. Mikhaĭlov, "On the theory of the ellipsometry of an actual surface," Journal of Optical Technology. 75 (1), 41-43 (2008). https://doi.org/10.1364/JOT.75.000041

This paper discusses the question of why it is not justified to describe surface roughness by an effective layer in the case of ellipsometric measurements. It is shown that the residual signal of an ellipsometer is determined by radiation scattering at the surface being measured.