УДК: 547.97: 535.8, 541.147
Formation of microstructures based on UV-hardenable acrylates
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Publication in Journal of Optical Technology
Фокина М.И., Денисюк И.Ю., Бурункова Ю.Э., Капорский Л.Н. Формирование микроструктур на основе УФ-отверждаемых акрилатов // Оптический журнал. 2008. Т. 75. № 10. С. 66–72.
Fokina M.I., Denisyuk I.Yu., Burunkova Yu.E., Kaporskiy L.N. Formation of microstructures based on UV-hardenable acrylates [in Russian] // Opticheskii Zhurnal. 2008. V. 75. № 10. P. 66–72.
M. I. Fokina, I. Yu. Denisyuk, Yu. É. Burunkova, and L. N. Kaporskiĭ, "Formation of microstructures based on UV-hardenable acrylates," Journal of Optical Technology. 75 (10), 664-669 (2008). https://doi.org/10.1364/JOT.75.000664
This paper discusses the possibilities of obtaining optical microstructures based on UV-hardenable acrylates. The applicability of the method of halftone lithography for obtaining polymeric microlenses and for forming microelements on the end of an optical fiber is investigated.
OCIS codes: 160.5470
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