Synthesizing film-forming materials based on aluminum nitride in order to form optical coatings from them

Кириленко В.В., Жигарновский Б.М., Павловский В.К., Маркелова И.П., Михайлов А.В., Муранова Г.А. Синтез пленкообразующих материалов на основе нитрида алюминия для формирования из них оптических покрытий // Оптический журнал. 2008. Т. 75. № 12. С. 50–56.

Kirilenko V.V., Zhigarnovskiy B.M., Pavlovskiy V.K., Markelova I.P., Mikhailov A.V., Muranova G.A. Synthesizing film-forming materials based on aluminum nitride in order to form optical coatings from them [in Russian] // Opticheskii Zhurnal. 2008. V. 75. № 12. P. 50–56.

V. V. Kirilenko, B. M. Zhigarnovskiĭ, V. K. Pavlovskiĭ, I. P. Markelova, A. V. Mikhaĭlov, and G. A. Muranova, "Synthesizing film-forming materials based on aluminum nitride in order to form optical coatings from them," Journal of Optical Technology. 75 (12), 800-805 (2008). https://doi.org/10.1364/JOT.75.000800

This paper discusses questions of synthesizing and pressing aluminum nitride in order to obtain film-forming materials that can be used to form optical coatings. Based on the resulting film-forming materials, a technological process has been developed for fabricating coatings from aluminum nitride, based on two vacuum methods of depositing thin films: vacuum evaporation and magnetron sputtering. Questions of the use of aluminum nitride films in optical instrumentation are considered.