Choosing the synthesis parameters of hologram-projectors for photolithography

Корешев С.Н., Никаноров О.В., Козулин И.А. Выбор параметров синтеза голограмм-проекторов для фотолитографии // Оптический журнал. 2008. Т. 75. № 9. С. 29–34.

Koreshev S.N., Nikanorov O.V., Kozulin I.A. Choosing the synthesis parameters of hologram-projectors for photolithography [in Russian] // Opticheskii Zhurnal. 2008. V. 75. № 9. P. 29–34.

S. N. Koreshev, O. V. Nikanorov, and I. A. Kozulin, "Choosing the synthesis parameters of hologram-projectors for photolithography," Journal of Optical Technology. 75 (9), 558-562 (2008). https://doi.org/10.1364/JOT.75.000558

This paper discusses features of the synthesis of hologram-projectors intended for use in a holographic version of the photolithographic process. The main attention is paid to how the discretization of the object and the hologram affects the structure of the reconstructed image. The requirements imposed on the calculational and display parameters of the synthesized holograms are formulated and substantiated. It is established that discretization of the synthesized holograms not only causes additional reconstructed images to appear but also restricts the minimum size of the elements of the reconstructed images to 1.5λ.