Study of the angular errors of dials fabricated by inverse photolithography

Кручинин Д.Ю., Анисимова О.В., Тырышкина А.С. Исследование угловых погрешностей лимбов, изготовленных методом обратной фотолитографии // Оптический журнал. 2009. Т. 76. № 6. С. 70–74.

Kruchinin D.Yu., Anisimova O.V., Tyryshkina A.S. Study of the angular errors of dials fabricated by inverse photolithography [in Russian] // Opticheskii Zhurnal. 2009. V. 76. № 6. P. 70–74. 

D. Yu. Kruchinin, O. V. Anisimova, and A. S. Tyryshkina, "Study of the angular errors of dials fabricated by inverse photolithography," Journal of Optical Technology. 76 (6), 373-376 (2009). https://doi.org/10.1364/JOT.76.000373

This paper discusses the results of a study of how the technological process of inverse photolithography affects the angular errors of circular optical scales (dials).