Using ion processing in nanotechnologies to obtain high-accuracy surfaces on optical items

Черезова Л.А., Михайлов А.В. Применение ионной обработки в нанотехнологиях получения высокоточных поверхностей оптических деталей // Оптический журнал. 2010. Т. 77. № 5. С. 51–54.

Cherezova L.A., Mikhailov A.V. Using ion processing in nanotechnologies to obtain high-accuracy surfaces on optical items [in Russian] // Opticheskii Zhurnal. 2010. V. 77. № 5. P. 51–54.

L. A. Cherezova and A. V. Mikhaĭlov, "Using ion processing in nanotechnologies to obtain high-accuracy surfaces on optical items," Journal of Optical Technology. 77(5), 336-338 (2010). https://doi.org/10.1364/JOT.77.000336

It is impossible to develop optical nanotechnologies for obtaining supersmooth surfaces on optical items and high-efficiency protective antireflection coatings without using and developing methods of ion processing of the surface of the optical items. This article discusses the use of ion processing to obtain supersmooth surfaces, with 3-5-Å roughness, on items made from various optical materials.