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ISSN: 1023-5086

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ISSN: 1023-5086

Scientific and technical

Opticheskii Zhurnal

A full-text English translation of the journal is published by Optica Publishing Group under the title “Journal of Optical Technology”

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УДК: 621.327: 621.384.4

Areas in which vacuum ultraviolet excilamps are used (Review)

For Russian citation (Opticheskii Zhurnal):

Соснин Э.А. Области применения вакуумных ультрафиолетовых эксиламп (обзор) // Оптический журнал. 2012. Т. 79. № 10. С. 66–76.

 

Sosnin E. A. Areas in which vacuum ultraviolet excilamps are used (Review)  [in English] // Opticheskii Zhurnal. 2012. V. 79. № 10. P. 66–76.

For citation (Journal of Optical Technology):

E. A. Sosnin, "Areas in which vacuum ultraviolet excilamps are used (Review)," Journal of Optical Technology. 79(10), 659-666 (2012). https://doi.org/10.1364/JOT.79.000659

Abstract:

This paper presents the results of using vacuum ultraviolet excilamps based on the excited inert-gas dimers Xe2* (172 nm), Kr2* (146 nm), and Ar2* (126 nm) in scientific research and commercial practice—namely, in illumination engineering and analytical instrumentation, for the creation of new optical materials, photochemistry, and the modification of surface properties.

Keywords:

vacuum ultraviolet, excimer, exilampa

OCIS codes: 260.7210, 230.6080, 240.6670, 350.3850, 350.5130, 160.4670, 310.0310

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