УДК: 681.785.35

LED broadband spectral ellipsometer with switching of orthogonal polarization states

Kovalev, V.I., Rukovishnikov, A.I., Kovalev, S.V., Kovalev, V.V.

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Ковалёв В.И., Руковишников А.И., Ковалёв С.В., Ковалёв В.В. Светодиодный широкодиапазонный спектральный эллипсометр с переключением ортогональных состояний поляризации // Оптический журнал. 2016. Т. 83. № 3. С. 55–59.

Kovalev V.I., Rukovishnikov A.I, Kovalev S.V., Kovalev V.V. LED broadband spectral ellipsometer with switching of orthogonal polarization states [in Russian] // Opticheskii Zhurnal. 2016. V. 83. № 3. P. 55–59.

For citation (Journal of Optical Technology):

V. I. Kovalev, A. I. Rukovishnikov, S. V. Kovalev, and V. V. Kovalev, "LED broadband spectral ellipsometer with switching of orthogonal polarization states," Journal of Optical Technology. 83(3), 181-184 (2016). https://doi.org/10.1364/JOT.83.000181

Abstract:

This paper describes an LED ellipsometer with a continuous wavelength range of 260–1000 nm and good technical characteristics. The measurement reproducibility and stability of the ellipsometric parameters Ψ and Δ of silicon with intrinsic dioxide at the peak wavelengths of the LED radiation are no worse than 0.001 and 0.01°, respectively. At wavelengths of 365, 375, 390, 405, 420, and 465 nm, the reproducibility of the Ψ and Δ measurements of metal films is around 0.0003 and 0.001°, respectively. The spectral resolution is 4 nm. The minimum time to measure Ψ and Δ in the entire wavelength range is 20 s.

Keywords:

LED spectral ellipsometer, polarization switching, achromatic compensator, high sensitivity, measurements constancy

OCIS codes: 120.2130

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