Study of the PhSh-Lambda interferometer’s resistance to external disturbances for testing large-scale flat optical elements

Fandienko I.Y., Vishnyakov, G.N., Minaev, V.L., Shumsky E.V., Minaev R.V., Arinin I.A., Kalyantsev V.N.

For Russian citation (Opticheskii Zhurnal):

Фандиенко И.Ю., Вишняков Г.Н., Минаев В.Л., Шумский Е.В., Минаев Р.В., Аринин И.А., Калянцев В.Н. Исследование устойчивости интерферометра «PhShЛямбда» к воздействию внешних возмущающих факторов при контроле плоских крупногабаритных оптических элементов // Оптический журнал. 2026. Т. 93. № 10. С. 31–42. http://doi.org/10.17586/1023-5086-2026-93-10-31-42

Fandienko I.Yu., Vishnyakov G.N., Minaev V.L., Shumsky E.V., Minaev R.V., Arinin I.A., Kalyantsev V.N. Study of the PhSh-Lambda interferometer’s resistance to external disturbances for testing large-scale flat optical elements [in Russian] // Opticheskii Zhurnal. 2026. V. 93. № 10. P. 31–42. http://doi.org/10.17586/1023-5086-2026-93-10-31-42

For citation (Journal of Optical Technology):

Abstract:

Subject of the study. An interference method for measuring deviations from flatness of optical surfaces of large-sized flat optical elements based on the PhSh-Lambda interferometer and an assessment of the effectiveness of interferogram processing algorithms under conditions of vibration and air disturbances. Aim of the study. Expanding the capabilities of the PhSh-Lambda interferometer by using it as a basic transmit/receive unit for a wide-area unequal-arm Twyman-Green interferometer for testing large flat optical elements up to 600 mm in diameter. Development of a set of measures to reduce the recording time for a series of interferograms and improve the interferometer's resistance to external disturbances, such as vibration and air currents. Method. Interferometry using the phase step method implemented by changing the laser radiation wavelength. To reconstruct phase images from interferograms, two algorithms were used: iterative and MTIA (Modified Three-step Iterative Algorithm), working with interferograms obtained under vibration conditions and with changes in the contrast of interference fringes. Measurements were carried out under conditions of varying degrees of protection from external disturbances. Main results. The feasibility of using the PhShLambda interferometer in a wide-aperture interferometer design is demonstrated, and the impact of environmental vibrations and turbulence on measurement accuracy is assessed. The use of the MTIA algorithm is shown to significantly improve the reliability of phase reconstruction, and the correlation between MTIA results and the phase image reconstruction method based on manual skeletonization of interferograms is confirmed. Practical significance. The PhSh-Lambda interferometer-based setup can be used in the production and verification of optical components up to 600 mm in size. The use of the MTIA algorithm significantly improved the quality of phase reconstruction and increased the accuracy of flatness deviation measurements based on the PV parameter by a factor of three, thereby confirming the algorithm's effectiveness in measurements under real-world industrial disturbances, making measurements less sensitive to vibrations and ambient temperature fluctuations.

Keywords:

Twyman–Green interferometer, phase shift, large-scale optics, variable-wavelength laser, alignment

OCIS codes: 120.3180, 120.3930, 120.3940, 120.4290, 120.4630, 120.5060

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