Серебряные наностолбики, сформированные методом пространственно-ограниченного химического осаждения: морфология, оптические и функциональные свойства

Markov D.P., Pavlov S.I., Ermina A.A., Bolshakov V.O., Prigoda K.V., Larin A.O., Fedorova E.S., Zharova Y.A.

For Russian citation (Opticheskii Zhurnal):

Марков Д.П., Павлов С.И., Ермина А.А., Большаков В.О., Пригода К.В., Ларин А.О., Фёдорова Е.С., Жарова Ю.А. Серебряные наностолбики, сформированные методом пространственно-ограниченного химического осаждения: морфология, оптические и функциональные свойства // Оптический журнал. 2026. Т. 93. № 10. С. 53–66. http://doi.org/10.17586/102350862026-93-10-53-66

Markov D.P., Pavlov S.I., Ermina A.A., Bolshakov V.O., Prigoda K.V., Larin A.O., Fedorova E.S., Zharova Yu.A. Silver nanopillars formed by spatially limited chemical deposition: morphology, optical and functional properties [in Russian] // Opticheskii Zhurnal. 2026. V. 93. № 10. P. 53–66. http://doi.org/10.17586/1023-5086-2026-93-10-53-66

For citation (Journal of Optical Technology):

Abstract:

Scope of research. Ordered arrays of vertical silver nanopillars on a silicon substrate fabricated via spatially constrained chemical deposition are investigated. The purpose of the work is to develop a reproducible technique for obtaining ordered arrays of silver nanopillars and to establish correlations between synthesis parameters and the morphological, optical, and functional characteristics of the structures. Method. The structures were synthesized by galvanic displacement of silver from an AgNO3/HF solution into the nanoholes of a polymethyl methacrylate template defined by electronbeam lithography. Morphology was characterized using scanning electron microscopy; optical properties were analyzed via spectral ellipsometry and dark-field spectroscopy; and functional performance was assessed by surface-enhanced Raman scattering spectroscopy. Main results. Control over diffusion mass transfer regimes was identified as the governing factor for the growth of nanopillar arrays (diameter ≈ 50 nm, height ≈ 150 nm). Optimal conditions (deposition time of — 10 s, grating period is less than 230 nm) ensuring reproducible defect-free structure formation were determined. Strong azimuthal anisotropy of the optical spectra was observed, indicating the influence of the grating geometry on the plasmon resonance. The surface-enhanced Raman scattering efficiency was found to be substantially dependent on the grating period, with a maximum enhancement factor of 5,5×103 achieved for the Brilliant Green dye. Practical significance. The proposed method circumvents the limitations of the standard lift-off process in fabricating nanopillar arrays with an aspect ratio of approximately 3. The approach serves as an effective alternative for the realization of 3D plasmonic metasurfaces suitable for high-sensitivity detectors and nanophotonic devices.

Keywords:

silver nanostructures, nanopillars, spatially constrained chemical deposition, galvanic displacement, electron-beam lithography, surface-enhanced Raman scattering, optical anisotropy, plasmonics, silicon

OCIS codes: 240.6680, 300.6450, 160.1190, 220.4000

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