Improved technology of single-point diamond turning for serial production of optical crystalline microresonators

Minkov, K.N., Ruzhitskaya D.D., Vorobyev A.K., Ledenev E.I., Gorbov V.M., Jirikov R.Y., Kalyaev V.Y., Tebeneva T.S., Shitikov, A.E., Bulygin, F.V.

For Russian citation (Opticheskii Zhurnal):

Миньков К.Н., Ружицкая Д.Д., Воробьев А.К., Леденёв Е.И., Горбов В.М., Джириков Р.Ю., Каляев В.Ю., Тебенева Т.С., Шитиков А.Е., Булыгин Ф.В. Усовершенствованная технология точечного алмазного точения для серийного изготовления оптических кристаллических микрорезонаторов // Оптический журнал. 2026. Т. 93. № 7. С. 69–79. DOI: 10.17586/1023-5086-2026-93-07-69-79

Minkov K.N., Ruzhitskaya D.D., Vorobyev A.K., Ledenev E.I., Gorbov V.M., Jirikov R.Yu., Kalyaev V.Yu., Tebeneva T.S., Shitikov A.E., Bulygin F.V. Improved technology of single-point diamond turning for serial production of optical crystalline microresonators [in Russian] // Opticheskii Zhurnal. 2026. V. 93. № 7. P. 69–79. DOI: 10.17586/1023-5086-2026-93-07-69-79

For citation (Journal of Optical Technology):

Abstract:

Subject. Serial production of high-quality optical microresonators with whispering gallery modes from anisotropic crystals. Objective. Development of a diamond point turning technique that enables serial production of optical microresonators with whispering gallery modes from anisotropic materials (MgF₂, BaMgF₄) in the diameter range from 75 µm to 25 mm with a tolerance of 1 µm, surface roughness of no more than 15 nm and a quality factor without polishing of at least 1ґ10⁵. Method. Detailed study of the stages of point diamond turning, identifying the causes of factors limiting the characteristics of optical microresonators at each processing stage, assessing their impact, and developing measures to eliminate the causes and reduce the impact of limiting factors. Main results. A three-stage process has been developed, including rough turning, formation of the toroidal surface of the optical microresonator, and finishing to achieve minimal roughness. The factors limiting the parameters of manufactured optical microresonators have been identified: machine vibration, wear of the cutting edge, cutter feed errors, and temperature fluctuations. The conducted research allowed developing measures to minimize these factors. Experimental confirmation of high reproducibility of the parameters of manufactured optical microresonators and their compliance with specified values has been achieved. The set of developed measures constitutes an improved point diamond turning method.

Keywords:

optical microresonators, whispering gallery modes, photonics, quality factor, diamond turning

Acknowledgements:

tis work was supported by the Russian Science Foundation (Project № 25-72-20050), using the equipment of the Shared Research Facilities of the All-Russian Research Institute for Optical and Physical Measurements and the High-Resolution Visualization Center at the Skolkovo Institute of Science and Technology.

OCIS codes: 120.0120, 160.1190, 160.4330

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