Advantages of multichannel optical measurements of the rotation angle of dielectric metasurfaces for miniature sensors

Shoev V.I., Shalymov E.V., Prokhorova U.V., Efremova E.A., Zinchik A.A., Krylov I.R., Venediktov, V.Y.

For Russian citation (Opticheskii Zhurnal):

Шоев В.И., Шалымов Е.В., Прохорова У.В., Ефремова Е.А., Зинчик А.А., Крылов И.Р., Венедиктов В.Ю. Преимущества многоканальных оптических измерений угла поворота диэлектрических метаповерхностей для миниатюрных датчиков // Оптический журнал. 2026. Т. 93. № 9. С. 26–36. http://doi.org/10.17586/1023-5086-2026-93-09-26-36

Shoev V.I., Shalymov E.V., Prokhorova U.V., Efremova E.A., Zinchik A.A., Krylov I.R., Venediktov V.Yu. Advantages of multichannel optical measurements of the rotation angle of dielectric metasurfaces for miniature sensors [in Russian] // Opticheskii Zhurnal. 2026. V. 93. № 9. P. 26–36. http://doi.org/10.17586/1023-5086-2026-93-09-26-36

For citation (Journal of Optical Technology):

Abstract:

Subject of study. Multichannel optical methods for measuring the rotation angle of dielectric metasurfaces. Aim of study. Development of new methods for measuring the rotation angle of dielectric metasurfaces that reduce the components of systematic error caused by resonance mode shifting and source power instability. Methods. Numerical simulation and analytical investigation of three multichannel methods for determining the rotation angle: the first is based on simultaneous measurement of transmitted power for TE and TM modes; the second on simultaneous registration of transmission and reflection of a single mode; and the third on the use of a segmented metasurface consisting of four identical subwavelength gratings with different groove orientations. Experiments were conducted on tantalum pentoxide metasurfaces on a quartz substrate using a tunable laser. Main results. The first multichannel method reduces the error from resonance mode shifting. The second method eliminates the error from source instability. The third method eliminates both components of systematic error and, in addition, provides absolute measurement of the rotation angle within a half-turn range without the use of polarization rotation. Practical significance. The results form a foundation for the development of miniature, precision, and stable rotation angle sensors, which are in demand in robotics, aerospace, and high-precision instrumentation.

Keywords:

rotation angle sensor, optical encoder, metasurface, segmented metasurface, dielectric structures, multichannel measurements

OCIS codes: 130.6010, 130.0130, 120.3930, 120.0120

References:

Guan R., Xu H., Lou Z., et al. Design and development of metasurface materials for enhancing photodetector properties // Advanced Sci. 2024. V. 11. № 34. P. 2402530. doi: 10.1002/advs.202402530.
Anju S., Chakyar S.P., Bindu C., et al. Rotation sensor based on near field perturbations of metamaterial split ring resonator // in 13th Intern. Cong. Artificial Materials for Novel Wave Phenomena — Metamaterials 2019. Rome, Italy. Sep. 16–21, 2019. doi: 10.1109/MetaMaterials.2019.8900857.
Ebrahimi A., Withayachumnankul W., et al. Metamaterial-inspired rotation sensor with wide dynamic range // IEEE Sensors J. 2014. V. 14. № 8. P. 2609–2614. doi: 10.1109/JSEN.2014.2313625.
Samatas G.G., Pachidis T.P. Inertial measurement units (IMUs) in mobile robots over the last five years: A review // Designs. 2022. V. 6. № 1. P. 17. doi: 10.3390/designs6010017.
Dagnino G., Kundrat D. Robot-assistive minimally invasive surgery: Trends and future directions // Intern. J. Intelligent Robotics and Applications. 2024. V. 8. P. 812–826. doi: 10.1007/s41315-024-00341-2.
Peng L., Xiangpeng L. Common sensors in industrial robots: A review // J. Phys.: Conf. Ser. 2019. V. 1267. P. 012036. doi: 10.1088/1742-6596/1267/1/012036.
Wang S., Ma R., Cao F., et. al A review: High-precision angle measurement technologies // Sensors. 2024. V. 24. № 6. P. 1755. doi: 10.3390/s24061755.
Seybold J., Bülau A., Fritz K.-P., et al. Miniaturized optical encoder with micro structured encoder disc // Appl. Sci. 2019. V. 9. № 3. P. 452. doi: 10.3390/app9030452.
Gurauskis D., Marinkovic D., et al. Self-calibratable absolute modular rotary encoder: Development and experimental research // Micromachines. 2024. V. 15. № 9. P. 1130. doi: 10.3390/mi15091130.
Filipozzi M., Iafolla L., Seppi C., et al. Miniaturized optical absolute rotary encoder: A proof of concept // Sensors and Actuators A: Physical. 2025. V. 394. P. 116879. doi: 10.1016/j.sna.2025.116879.
Pang D.-C., Lai Y.-W. Rapid prototyping of a micromotor with an optical rotary encoder // Micromachines. 2017. V. 8. № 6. P. 174. doi: 10.3390/mi8060174.
Mashimo T., Izuhara S. Recent advances in micromotors // IEEE Access. 2020. V. 8. P. 213489–213498. doi: 10.1109/ACCESS.2020.3041457.
Kang G., Tan Q., Wang X., et al. Achromatic phase retarder applied to MWIR & LWIR dual-band // Opt. Exp. 2010. V. 18. № 2. P. 1695–1703. doi: 10.1364/OE.18.001695.
Rosenblatt D., Sharon A., Friesem A.A. Resonant grating waveguide structures // IEEE J. Quantum Electron. 1997. V. 33. № 11. P. 2038–2059. doi: 10.1109/3.641320.
Efremova E.A., Prokhorova U.V., Shalymov E.V., et al. Prototype of a metasurface scale for an optical rotation angle sensor // Proc. SPIE. 2023. V. 12773. P. 1277307. doi: 10.1117/12.2689337.
Kazakova A.D., Shalymov E.V., Larionov D.Yu., et al. Influence of the scale slope on the measurement of the rotation angle by the response of nanostructured metasurfaces // in 2022 Conf. Russian Young Researchers in Electrical and Electronic Engineering (ElConRus). St. Petersburg, Russia. Jan. 25–28, 2022, P. 1115–1118. doi: 10.1109/ElConRus54750.2022.9755850.
Zhao Q., Zhang H., Yang J., et al. Low-loss low thermo-optic coefficient Ta₂O₅ on crystal quartz planar optical waveguides // APL Photonics. 2020. V. 5. № 11. P. 116103. doi: 10.1063/5.0024743.
Prokhorova U.V., Shalymov E.V., Shoev V.I., et al. Analysis of factors affecting the accuracy of rotation angle measurement using nanostructured metasurfaces // Proc. SPIE. 2022. V. 12321. P. 123210C. doi: 10.1117/12.2642137.