DOI: 10.17586/1023-5086-2026-93-09-37-48
УДК: 535.015
Measurement of light beam wavefront small-scale deformations, covering a wide range of spatial frequencies
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Subject of research. Small-scale deformations of light beam wavefront characterized by a nanometer range of amplitudes caused by distortions of the beam by optical elements. Purpose of research. Development of method for measuring small-scale deformations of the light beam wavefront, characterized by a wide spectrum of spatial frequencies and a nanometer range of amplitudes. Method. The measurement method is based on registration and specific processing of intensity distributions in the cross-section of the under-focus light beam. Main results. Due to diffraction phenomena and noise presence, the accuracy of measuring small-scale wavefront deformations based on intensity distribution processing for the under-focus light beam decreases with increase in the width of the spatial spectrum of deformations. Acceptable ratio of the upper and lower limits of the frequency interval of deformations, ensuring high measurement accuracy, has been found — not more than 2.5. For a wider range of spatial spectrum, it is necessary to divide the range into several frequency intervals and to find for each interval respective positions of registration planes for intensity distribution of the distorted beam. Practical significance. The method is distinguished by simplicity of technical implementation and is characterized by high accuracy and low sensitivity to interference. Measurement results allow for analysis of localization of small-scale wavefront deformations in both coordinate and frequency space, which is important for selecting the optimal finishing method for optical components.
light beam, small-scale deformations of wavefront, intensity fluctuations, spatial frequencies, wide spectrum
OCIS codes: 120.0120, 260.0260
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