Using the moiré effect to create high-accuracy diffraction systems for monitoring the geometrical parameters of objects

Назаров В.Н., Иванов А.Н. Использование муарового эффекта для создания высокоточных дифракционных систем контроля геометрических параметров объектов // Оптический журнал. 2010. Т. 77. № 4. С. 70–74.

Nazarov V.N., Ivanov A.N. Using the moiré effect to create high-accuracy diffraction systems for monitoring the geometrical parameters of objects [in Russian] // Opticheskii Zhurnal. 2010. V. 77. № 4. P. 70–74.

V. N. Nazarov and A. N. Ivanov, "Using the moiré effect to create high-accuracy diffraction systems for monitoring the geometrical parameters of objects," Journal of Optical Technology. 77(4), 280-283 (2010). https://doi.org/10.1364/JOT.77.000280

This paper proposes a method of diffraction monitoring based on illuminating the test object with a pair of wave fronts propagating at an angle to each other. It is established that such illumination results in the formation of a moiré pattern whose form is associated with the geometrical parameters of the test object. The possibility of using this method to monitor the thickness of objects is considered.

The research was supported by the government of Saint-Petersburg (grant No. 28-04/18).